Abstract:The optical phased array (OPA) chip is becoming the core component of all-solid-state lidars. In order to realize the wide-angle range beam scanning and rapid control of OPA-based solid-state lidars, we design and fabricate a 64-channel silicon-based OPA chip based on thermo-optical modulation. In accordance with the optical phase control characteristics of the multichannel thermo-optic OPA chip, we propose a parallel random access memory (RAM) array technique to realize high-speed phase control for the OPA chip and build the hardware system with a field-programmable logic gate array (FPGA). This system is used to test the main performance indicators of the OPA chip and realizes the high-speed scanning control of the wide-angle range of the OPA output beam. The test results show that the OPA chip we designed can achieve fast beam scanning within a large angle range between −32.5° and +32.5°, and the chip has high working reliability. Combined with the control system we build, it can meet the high-speed radar scanning requirements of all-solid-state lidars. This work lays a good foundation for the subsequential development of our thermo-optical and electrooptic OPA all-solid-state lidar prototypes.

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