Design and Fabrication of SiN-Si Dual-Layer Optical Phased Array Chip

Yanmei Su,Jianbin Ma,Ruiting Wang,Yejin Zhang,Zhengxia Yang,Yang Xu,Pengfei Wang,Yajie Li,Jiao-qing Pan,Xuliang Zhou,Guangzhen Luo
DOI: https://doi.org/10.1364/prj.387376
2019-11-01
Abstract:A 64-channel SiN-Si dual-layer optical phased array (OPA) chip is designed and fabricated. It combines the low loss of SiN with the excellent modulation performance of Si, which improves the performance of Si single-layer OPA.
Materials Science,Engineering,Physics
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