Compact Threshold Voltage Model f or FinFETs 3

Zhang Dawei,Tian Lilin,Yu Zhiping
2005-01-01
Abstract:A 2D analytical elect ro statics analysis fo r t he cro ss2section of a FinF ET (or t ri2gate MOSF ET) is per2 formed to calculate t he t hreshold voltage. The analysi s result s in a modified gate capacitance wit h a coefficient H in2 t roduced to model t he effect of t ri2gates and it s asymptotic behavior in 2D is t hat fo r double2gate MOSFET. The po2 tential p rofile o btained analytically at t he cro ss2sectio n agrees well wit h numerical simulations. A compact t hreshold voltage model for FinF ET ,comp rising quant um mechanical effect s ,is t hen p ropo sed. It is concluded t hat bot h gate capacitance and t hreshold voltage will increase wit h a decreased height ,o r a decreased gate2oxide t hickness of t he top gate ,which is a t rend in FinFET design.
What problem does this paper attempt to address?