Compact Threshold Voltage Model for FinFETs

Dawei Zhang,Lilin Tian,Zhiping Yu
DOI: https://doi.org/10.3969/j.issn.1674-4926.2005.04.007
2005-01-01
Chinese Journal of Semiconductors
Abstract:A 2D analytical electrostatics analysis for the cross-section of a FinFET (or tri-gate MOSFET) is per formed to calculate the threshold voltage. The analysis results in a modified gate capacitance with a coefficient H in troduced to model the effect of tri-gates and its asymptotic behavior in 2D is that for double-gate MOSFET. The potential profile obtained analytically at the cross-section agrees well with numerical simulations. A compact threshold voltage model for FinFET, comprising quantum mechanical effects, is then proposed. It is concluded that both gate capacitance and threshold voltage will increase with a decreased height,or a decreased gate-oxide thickness of the top gate,which is a trend in FinFET design.
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