Gate current modeling of high-k stack nanoscale MOSFETs

Wei Wang,Ning Gu,J.P. Sun,P. Mazumder
DOI: https://doi.org/10.1016/j.sse.2006.08.004
IF: 1.916
2006-01-01
Solid-State Electronics
Abstract:A unified approach, particularly suitable for evaluation of high-k stack structures, is presented. This approach is based on fully self-consistent solutions to the Schrödinger and Poisson equations. Various structures and materials of high-k stacks of interest have been examined and compared to access the reduction of gate current in these structures. The present approach is capable of modeling high-k stack structures consisting of multiple layers of different dielectrics. The results of gate current and capacitance obtained from our model are in very good agreement with experimental data.
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