Simulation and Analysis of Gate Stack DG MOSFET with Application of High-k Dielectric Using Visual TCAD

Nisha Yadav,Sunil Jadav,Gaurav Saini
DOI: https://doi.org/10.1201/9781003121589-7
2021-07-30
Abstract:With the advancement in technology, reduction in silicon dioxide thickness results in small leakage current due to quantum tunneling effect. Therefore, it is required to replace the thin SiO2 layer with a thicker layer having high-k dielectric. HfO2 (k = 24) is the best-suited material for the required performance. In this chapter, double-gate (DG) metal oxide semiconductor field effect transistor (MOSFET) with high-k dielectric material is analyzed. A close comparison is made between DG MOSFET with high-k and without high-k dielectric material. Other parameters like surface potential, charge density, electric field, band bending, sub-threshold swing (SS), and ON-current/OFF-current (Ion/Ioff) are also discussed. The results presented in this chapter are verified by CAD simulations of DG MOSFETs, and it is found that high-k DG MOSFET shows superior performance in comparison to the same without high-k. The simulation is done using Visual TCAD.
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