Research on effect of environmental temperature on RF-MEMS switch pull-in voltage

LIU Lei,ZHANG Gao-fei,YOU Zheng
DOI: https://doi.org/10.3969/j.issn.1000-9787.2013.05.002
2013-01-01
Abstract:Compared with traditional electronic switch,RF-MEMS switch has advantages on RF characteristic,power consumption and volume.Pull-in voltage is the important technical specification of MEMS switch.Effect of environmental temperature on pull-in voltage is studies.Impact module of environmental temperature on pull-in voltage is built up and theoretical formula is obtained.The change curve of pull-in voltage on environmental temperature is obtained through experiments.Experimental results indicate that in the range of-10 ~40 ℃,pull-in voltage descends with the decline of environmental temperature.Maximum voltage change(8.8V) is 15 % of pull-in voltage(58.6V) at-10 ℃,environmental temperature has important impact on pull-in voltage.
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