Abstract:Previously, we proposed that the dielectric layer of RF MEMS switch can be fabricated either on the transmission line, as traditional switches, or on the lower surface of the bridge. This paper presents a detailed comparison of the RF MEMS switches with different positions of dielectric layer. Through theoretically analyzing the physical model of fringing capacitance, it is revealed that different positions of dielectric layer can result in different switch capacitances. Therefore, the change of dielectric-layer position can reduce the switch capacitance and insertion loss when the bridge is much wider than t-line. The theoretical analysis is demonstrated by Maxwell 3D and HFSS simulation, showing that the insertion loss is reduced by around 13% when the bridge width is three times of transmission line width. Further, the influence of switch’s structural parameters, such as dielectric material and dimensions of dielectric layer, on the differences between these two kinds of switches is discussed. To achieve high integration together with low-loss and low-actuation-voltage design, the novel switch with dielectric layer on bridge’s lower surface can be expected to have broad applications in the future.

Improved Working Properties of RF MEMS Switch by Pre-Injecting Charges into the Dielectric Layer

Long-term RF Burn-in Effects on Dielectric Charging of MEMS Capacitive Switches

Intermodulation Distortion in MEMS Capacitive Switches under High RF Power

The Effect of Dielectric Charging on Capacitive Mems Switch

An Analytical Model for High Performance Capacitive RF MEMS Switch Design

Novel Process for Fabrication of RF MEMS Switch with High Mechanical Reliability

Charge Accumulation in Composite Dielectric Layers in Capacitive RF MEMS Switches

Power Handling Capability Enhanced RF MEMS Switch Using Modified-Width Cantilevers Structure

Comparison of the RF MEMS Switches with Dielectric Layers on the Bridge’s Lower Surface and on the Transmission Line

Power Handling Capability Improvement of Metal-Contact RF MEMS Switches by Optimized Array Configuration Design of Contact Dimples

Preparing of a High Speed Bistable Electromagnetic RF MEMS Switch

Design and Experimental Validation of A Restoring Force Enhanced Rf Mems Capacitive Switch with Stiction-Recovery Electrodes

Design, optimization and simulation of a low-voltage shunt capacitive RF-MEMS switch

DISTRIBUTED MULTICONTACT RF MEMS SWITCH FOR POWER HANDLING CAPABILITY IMPROVEMENT

Actuated Voltage Shift Mechanisms Of Mems Capacitive Switch Based On Distributed Phase Shifter

Developing RF MEMS Switches Technology

Capacitive Rf MEMS Switch with Composite Beam

Design of A Novel Bulk Micro-Machined Rf Mems Switch

Design and Modeling of a Continuously Variable Piezoelectric RF MEMS Switch

A low-loss RF MEMS switch with dielectric layer on the lower surface of the bridge

Novel Multicontact Radio Frequency Microelectromechanical System Switch in High-Power–handling Applications