Design of a Biaxial High-G Piezoresistive Accelerometer with a Tension–Compression Structure
Peng Wang,Yujun Yang,Manlong Chen,Changming Zhang,Nan Wang,Fan Yang,Chunlei Peng,Jike Han,Yuqiang Dai
DOI: https://doi.org/10.3390/mi14081492
IF: 3.4
2023-07-26
Micromachines
Abstract:To meet the measurement needs of multidimensional high-g acceleration in fields such as weapon penetration, aerospace, and explosive shock, a biaxial piezoresistive accelerometer incorporating tension–compression is meticulously designed. This study begins by thoroughly examining the tension–compression measurement mechanism and designing the sensor's sensitive structure. A signal test circuit is developed to effectively mitigate cross-interference, taking into account the stress variation characteristics of the cantilever beam. Subsequently, the signal test circuit of anti-cross-interference is designed according to the stress variation characteristics of the cantilever beam. Next, the finite element method is applied to analyze the structure and obtain the performance indices of the range, vibration modes, and sensitivity of the sensor. Finally, the process flow and packaging scheme of the chip are analyzed. The results show that the sensor has a full range of 200,000 g, a sensitivity of 1.39 μV/g in the X direction and 1.42 μV/g in the Y direction, and natural frequencies of 509.8 kHz and 510.2 kHz in the X and Y directions, respectively.
chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied