Cathodoluminescence Study of InGaN MQW Laser Diodes Using Laser Lift‐off Technique
Rui Li,Weihua Chen,Xiangning Kang,Ke Xu,Jun Xu,Zhijian Yang,Ruijuan Nie,Tongjun Yu,Zhizhong Chen,Zhixin Qin,Guoyi Zhang,Zizhao Gan,Xiaodong Hu
DOI: https://doi.org/10.1002/pssc.200673525
2007-01-01
Abstract:ln this paper, spatially integrated or spatially resolved cathodoluminescence (CL) spectroscopy were employed to evaluate the structural and optical changes of InGaN multiple quantum well (MQW) structure before and after Laser lift-off (LLO) process. As for a partially strain-relaxed ln(0.1)Ga(0.9)N MQW laser diode (LD) structure with cracking in underlying epitaxial layers, LLO did not cause the blue shift in CL spectra as expected, but rather the red shift induced by the indium diffusion from its abundant regions around cracks. This result could be proved by the monochromated scanning CL images taken at 390 nm and 408 nm not having the same obvious complementary as those of original ones. Compared with calculated laser fluence for LLO, this phenomenon could be mainly attributed to the easy penetration of laser energy via cracks and consequent irradiation absorption within MQWs.