Photoluminescence from InGaN/GaN MQWs on Sapphire and Membranes Fabricated by Laser Lift‐off

TJ Yu,ML Li,ZX Qin,ZZ Chen,ZJ Yang,XD Hu,GY Zhang
DOI: https://doi.org/10.1002/pssb.200405024
2004-01-01
Abstract:Photoluminescence and Raman scattering spectra of InGaN/GaN MQWs on sapphire and membranes free of substrate fabricated by laser lift-off have been studied. It is observed that photolummescence peak of 850 degreesC annealed sample red-shifts from that of as grown sample, while in the case of membrane samples, the luminescence peak blue-shifts when annealed at 700 degreesC. In Raman scattering spectra, InGaN/GaN MQWs film without sapphire substrate has a lower E-2 mode frequency (569.3 cm(-1)) than that of the films with substrate (570.8 cm(-1)), which indicates that compressive stress in the films releases partially when the sapphire substrate is taken off. It is believed that the piezoelectric field decrease leads to the blue-shift in luminescence spectra. Compared with the samples with sapphire substrate, the free-standing membranes showed blue-shift of luminescence peak after relatively low temperature annealing, because the piezoelectric field reduced more easily in the films without substrate.
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