Properties of Texture-etched ZnO∶Al Substrates

XUE Jun-ming,HUANG Yu,XIONG Qiang,MA Tie-hua,SUN Jian,ZHAO Ying,GENG Xin-hua
DOI: https://doi.org/10.3321/j.issn:1000-1093.2008.04.026
2008-01-01
Abstract:Using a 2% Al-doped Zn target,ZnO∶Al(ZAO)thin films were deposited on a glass substrate by mid-frequency pulsed magnetron sputtering.The texture-etched ZAO substrates were prepared by etching the smooth films in diluted HCl.The dependence of surface textures on power,pressure,etching time and diluted HCl chroma were investigated,and the resistivity of ZAO films before and after etching in diluted HCl were analyzed.The results indicate that the good surface textures of ZAO thin films could be prepared under the conditions of low power,low pressure,etching time of 20?s and diluted HCl chroma of 0.5%,such ZAO thin film has the potential application in silicon thin film solar cells.
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