Analysis of the Rate of Change of Inversion Charge in Thin Insulator P-Type Metal-Oxide-Semiconductor Structures

MZ XU,CH TAN,YD HE,YY WANG
DOI: https://doi.org/10.1016/0038-1101(95)98673-q
IF: 1.916
1995-01-01
Solid-State Electronics
Abstract:A model of the rate of change of inversion charge has been used to investigate the capacitance relaxation associated with Fowler-Nordheim tunneling current in thin insulator p-type Metal-Oxide-Semiconductor (MOS) structures. In this model, the rate of change of inversion charge is taken to be equal to the difference between the generation current in the space charge region of Si and the Fowler-Nordheim tunneling current through the oxide. Using a step voltage, analytical expression for high frequency capacitance relaxation is obtained, the experimental results are consistent with model calculations.
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