Stress-impedance Effects of FeSiB/Cu/FeSiB Trilayers with a Meander Structure

CHEN Ji-an,MAO Xin-hui,ZHAO Xiao-yu,DING Wen,CAO Ying,ZHOU Yong

DOI: https://doi.org/10.3969/j.issn.1007-4252.2005.04.005

2005-01-01

Abstract:FeSiB/Cu/FeSiB trilayers with a meander structure were fabricated by magnetron sputtering on thin glass substrate,and the stress-impedance(SI) effects were studied in the frequency range of 1-40MHz for different film thicknesses of FeSiB films and Cu layer.Experimental results show that the values of stress-impedance(SI) ratio increase nearly linearly with the deflection of the FeSiB/Cu/FeSiB trilayers at high frequencies,and a large negative SI ratio of-18.3% is obtained at 25MHz with 1mm deflection in the FeSiB/Cu/FeSiB trilayers with a thicker FeSiB film.It′s attractive for the applications in stress sensors.