Formation of Nitride Cu3n by Mev N-Ion Implantation into Cu

FZ CUI,AM VREDENBERG,R DEREUS,FW SARIS
DOI: https://doi.org/10.1088/0256-307x/8/10/009
1991-01-01
Chinese Physics Letters
Abstract:Experimental evidences are presented to show the formation of nitride, Cu3N, in pure Cu sample by N-ion implantation. This result is obtained in the case of MeV ion implantation. Previous experiments showed that this compound can not be formed by N-ion implantation into Cu at incident energy of about 100 keV. This finding indicates there exist certain differences in phase formation by ion implantation at the two energies.
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