Development of High Breakdown Voltage AlGaN/GaN HEMT for Power Switching Device

Zhang Minglan,Yang Ruixia,Wang Xiaoliang,Hu Guoxin,Gao Zhi
DOI: https://doi.org/10.3969/j.issn.1003-353x.2010.05.001
2010-01-01
Abstract:Acting as the representative of the third generation semiconductor materials,GaN becomes the focus of research all over the world.The development of AlGaN/GaN HEMT with high breakdown voltage,high frequency,and low loss is reviewed.Beginning with the introduction of the device structure,some critical problems hindering this research are discussed,including improvement of the breakdown characteristic,advantage in high frequency performance,growth of AlGaN/GaN heterostructures on Si substrate,fabrication of enhancement-mode AlGaN/GaN HEMT,and development of power integrated circuit.The possible application of high breakdown voltage AlGaN/GaN HEMT is predicted.
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