High voltage InAlN/GaN HEMTs with nonalloyed Source/Drain for RF power applications

Qi Zhou,Shu Yang,Wanjun Chen,Bo Zhang,Zhihong Feng,Shujun Cai,Kevin J. Chen
DOI: https://doi.org/10.1016/j.sse.2013.09.006
IF: 1.916
2014-01-01
Solid-State Electronics
Abstract:•Propose nonalloyed Schottky-Source/Drain technology enabling a gate-first InAlN/GaN HEMTs.•The Schottky source can reduce source carrier injection and subthreshold leakage.•The gate-first InAlN/GaN HEMTs achieves 229% improvement in breakdown voltage.•The Schottky-Source/Drain technology is beneficial to device downscaling.•This gate-first InAlN/GaN HEMTs show great promise for self-aligned HEMTs.
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