Abstract:In this research, a high-efficiency design method of the capacitive MEMS accelerometer is proposed. As the MEMS accelerometer has high precision and a compact structure, much research has been carried out, which mainly focused on the structural design and materials selection. To overcome the inconvenience and inaccuracy of the traditional design method, an orthogonal design and the particle swarm optimization (PSO) algorithm are introduced to improve the design efficiency. The whole process includes a finite element method (FEM) simulation, high-efficiency design, and verification. Through the theoretical analysis, the working mechanism of capacitive MEMS accelerometer is clear. Based on the comparison among the sweep calculation results of these parameters in the FEM software, four representative structural parameters are selected for further study, and they are le, nf, lf and wPM, respectively. le and lf are the length of the sensing electrode and fixed electrode on the right. nf is the number of electrode pairs, and wPM is the width of the mass block. Then, in order to reduce computation, an orthogonal design is adopted and finally, 81 experimental groups are produced. Sensitivity SV and mass Ma are defined as evaluation parameters, and structural parameters of experimental groups are imported into the FEM software to obtain the corresponding calculation results. These simulation data are imported into neural networks with the PSO algorithm. For a comprehensively accurate examination, three cases are used to verify our design method, and every case endows the performance parameters with different weights and expected values. The corresponding structural parameters of each case are given out after 24 iterations. Finally, the maximum calculation errors of SV and Ma are 1.2941% and 0.1335%, respectively, proving the feasibility of the high-efficiency design method.

Serpentine spring design technique for high sensitivity MEMS capacitive accelerometer fabricated by gold multi-layer metal technology

A Stiffness-Tunable MEMS Accelerometer

A New Type of MEMS Accelerometer with Up-Tuning Structure

An In-Plane Low-Noise Accelerometer Fabricated with an Improved Process Flow

Fabrication of a MEMS Capacitive Accelerometer with Symmetrical Double-Sided Serpentine Beam-Mass Structure

Mechanical Design Optimization of A Single-Axis Moems Accelerometer Based on A Grating Interferometry Cavity for Ultrahigh Sensitivity

Design and Fabrication of a Micro-Electromechanical System Sandwich Capacitive Accelerometer

Resonant Frequency Analysis for Spring-Mass Structure in High-G MEMS Accelerometer

Piezoresistive Slot-Cantilever Type Accelerometer Inspired from Spider'S Slit Sensilla

Design and Fabrication Research on a Capacitive Accelerometer

A Low Noise Capacitive MEMS Accelerometer with Anti-Spring Structure

The High-Efficiency Design Method for Capacitive MEMS Accelerometer

3-axis Capacitive Low-Gravity MEMS Accelerometer with Zero Cross-Axis Sensitivity in a Commercial Process

Design And Implementation Of A Novel Cmos-Mems Single Proof-Mass Tri-Axis Accelerometer

A New Symmetrical Beam-Mass Structure for Accelerometers by Anisotropic Etching Without Convex Corner Compensation

A Novel Capacitive Accelerometer with A Highly Symmetrical Double-Sided Beam-Mass Structure

High-Performance Single-Side Fabricated (111)-Silicon Dual-Cantilever Accelerometer with Squeeze-Film Air Damping Modulation

Post-Cmos Selective Electroplating Technique for the Improvement of Cmos-Mems Accelerometers

Design And Fabrication Of A Slanted-Beam Mems Accelerometer

A Novel Tunable Lateral Sensing Capacitive Silicon Micromachined Accelerometer with High Sensitivity

Z-Axis Capacitive Accelerometer With Novel Beams Using Sog Structure