Large-Size and Ultrahigh Purity Tungsten with Enhanced Physical Properties via Chemical Vapor Deposition

Lipei Peng,Shiwei Wu,Xicheng Wei,Wei Peng,Yafeng Wang,Tengshi Liu,Shaobo Li,Xiangjun Meng,Han Dong
DOI: https://doi.org/10.1021/acsomega.4c06723
IF: 4.1
2024-10-22
ACS Omega
Abstract:Conventional powder metallurgy techniques fail to meet the demands for ultrahigh purity tungsten (UHPW) and scalable component sizes required by the semiconductor industry. In this study, ultrahigh purity (99.999998 wt %) large-size tungsten parts, with an adjustable thickness and a diameter of 350 mm, were prepared via a chemical vapor deposition (CVD) method using ultrahigh purity (99.9999 wt %) tungsten hexafluoride (WF(6)) as the precursor. The microstructure and physical properties of the...
chemistry, multidisciplinary
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