Dual Current and Voltage Sensitivity Temperature Sensor Based on Lateral p-GaN/AlGaN/GaN Hybrid Anode Diode

Xing Wei,Xiaodong Zhang,Xin Zhou,Yongjian Ma,Wenbo Tang,Tiwei Chen,Weining Liu,Wenxin Tang,Guohao Yu,Yaming Fan,Kai Fu,Yong Cai,Baoshun Zhang

DOI: https://doi.org/10.1109/jsen.2021.3109915

IF: 4.3

2021-10-15

IEEE Sensors Journal

Abstract:In this work, a p-GaN/AlGaN/GaN hybrid anode diode (HAD) temperature sensor was fabricated by using hydrogen plasma treatment. The zero-temperature coefficient (ZTC) is about 0.7 V from the <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="1.172ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 504.5 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-49" x="0" y="0"></use></g></svg></span> – <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="1.787ex" height="2.176ex" style="vertical-align: -0.338ex;" viewBox="0 -791.3 769.5 936.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-56" x="0" y="0"></use></g></svg></span> characteristics measured at various temperatures. At the forward region below the ZTC bias point, the anode voltage ( <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="8.857ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 3813.5 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-56" x="0" y="0"></use><g transform="translate(583,-163)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-6D" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-61" x="878" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1408" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-68" x="1769" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-72" x="2346" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-6D" x="2797" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-41" x="3676" y="0"></use></g></g></svg></span> ) at a specific anode current density ( <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="8.525ex" height="2.509ex" style="vertical-align: -0.671ex;" viewBox="0 -791.3 3670.5 1080.4" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-49" x="0" y="0"></use><g transform="translate(440,-163)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-6D" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-61" x="878" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-74" x="1408" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-68" x="1769" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-72" x="2346" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-6D" x="2797" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-41" x="3676" y="0"></use></g></g></svg></span> ) decreases linearly with the increase of temperature, resulting in a sensitivity ranging from 1.64 mV/K (10⁻⁵ mA/mm) to 0.69 mV/K (10⁻² mA/mm). The leakage current at the reverse bias also presents a temperature-dependent behavior with a sensitivity ranging from 16.76 mA/K (−100 V) to 27.94 mA/K (−5 V). 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