Abstract:Thin-film lithium niobate (TFLN) has been considered as one of the most important platforms for constructing high-performance photonic integrated devices such as electro-optic modulators, frequency combs, classical/quantum light sources, and large-scale photonic integrated circuits, benefiting from its excellent optical properties of TFLN. The fabrication quality of TFLN photonic integrated devices plays an important role in the performance and the integration scale of these devices. As one of the element photonic structures, the state-of-the-art TFLN microrings reach an intrinsic Q factor higher than 10^7 with ultra-smooth sidewalls, fabricated by photolithography assisted chemo-mechanical etching (PLACE). However, it is isolated on the chip surface and a tapered fiber is required to couple the light into and out of the resonator. Furthermore, it is difficult to maintain such high-Q factors when the microrings are monolithically integrated with bus waveguides by PLACE, resulted from large coupling loss with biggish coupling gap. Here, a relatively narrow gap of an ultra-high Q microring monolithically integrated with the bus-waveguide is achieved with 3.8 um by optimizing PLACE process, and a high temperature annealing is carried out to improve the loaded (intrinsic) Q factor with 4.29 X 10^6 (4.04 X 10^7), leading an ultra-low propagation loss of less than 1 dB/m, which is approximately 3 times better than the best values previously reported in ion-slicing TFLN platform.

Q-factor modification of LN based WGM resonator

Lithium Niobate Whispering Gallery Mode Disk Resonator with High Q Factor

Monolithic Integration of a High-Quality Factor Lithium Niobate Microresonator with a Free-Standing Membrane Waveguide Using Femtosecond Laser Assisted Ion Beam Writing (FLAIBW)

Monolithic Integration of a Lithium Niobate Microresonator with a Free-Standing Waveguide Using Femtosecond Laser Assisted Ion Beam Writing.

Fabrication of Microresonators of High Q/V Ratios Using Femtosecond Laser Micromachining

Broadband Highly Efficient Nonlinear Optical Processes in On-Chip Integrated Lithium Niobate Microdisk Resonators of Q-factor above 108

Fabrication of high-Q lithium niobate microresonators using femtosecond laser micromachining

Highly-efficient second and third harmonic generation in a monocrystalline lithium niobate microresonator.

Lead indium niobate-lead magnesium niobate-lead titanate based whispering gallery mode resonator

High-quality-factor Optical Microresonators Fabricated on Lithium Niobate Thin Film with an Electro-Optical Tuning Range Spanning over One Free Spectral Range [Invited]

High- Q Exterior Whispering-Gallery Modes in a Double-Layer Crystalline Microdisk Resonator

Lithium niobate microring with ultra-high Q factor above 10^8

Whispering-gallery Mode Hexagonal Micro-/Nanocavity Lasers [Invited]

High-quality Lithium Niobate Photonic Crystal Nanocavities

Lithium niobate micro-disk resonators of quality factors above 10^7

Optical Resonances in Tubular Microcavities with Subwavelength Wall Thicknesses

Ultra-high Q lithium niobate microring monolithically fabricated by photolithography assisted chemo-mechanical etching

Quality Improvement and Mode Evolution of High-Q Lithium Niobate Micro-Disk Induced by "light Annealing"

Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser

Investigation on the temperature coefficient of frequency performance of LiNbO3 on quartz and glass surface acoustic wave resonators

Robustly Packaged Lithium Niobate Resonator-Based Temperature Sensor