Effect of annealing on mechanical quality factor of fused quartz hemispherical resonator

Mohammed J. Ahamed,Doruk Senkal,Andrei M. Shkel

DOI: https://doi.org/10.1109/isiss.2014.6782512

2014-02-01

Abstract:This paper reports the experimental demonstration of Quality factor (Q-factor) improvement of fused quartz hemispherical resonators after post-fabrication annealing. Several identical fused quartz 3D hemispherical resonators, thickness 1 mm and diameter 10 mm were fabricated using micro-glassblowing process and tested before and after annealing. Results showed that annealing at 800°C for 6 hours followed by slow overnight cooling significantly improved Q-factor, from $666\times 10^{3}$ to $932\times 10^{3}$ ’, in our experiments. The annealing dependence was investigated by varying temperature from 500°C to 800°C. Change in Q-factor was observed to be minimal (<10%), when annealed at 500°C, for both ${\bf n}=2$ and ${\bf n}=3$ wineglass modes. Q-factor changes were ~40% when annealed at 800°C. The experimental result on Q-factor enhancement is valuable for the development of very high Q fused quartz vibratory MEMS resonators for use in precision inertial sensing.