Abstract:We report on fabrication of three-dimensional (3D) high-quality (Q) whispering-gallery-mode microcavities by femtosecond laser micromachining. The main fabrication procedures include the formation of on-chip freestanding microdisk through selective material removal by femtosecond laser pulses, followed by surface smoothing processes (CO2 laser reflow for amorphous glass and focused ion beam (FIB) sidewall milling for crystalline materials) to improve the Q factors. Fused silica microcavities with 3D geometries are demonstrated with Q factors exceeding 106. A microcavity laser based on Nd:glass has been fabricated, showing a threshold as low as 69μW via free space continuous-wave optical excitation at the room temperature. CaF2 crystalline microcavities with Q factor of ~4.2×104 have also been demonstrated. This technique allows us to fabricate 3D high-Q microcavities in various transparent materials such as glass and crystals, which will benefit a broad spectrum of applications such as nonlinear optics, quantum optics, and bio-sensing.

Fabrication and test of millimeter-size CaF2 disk resonator

Ring Resonator of Hollow-Core Photonic Crystal Fiber Based on Spatial Coupling Scheme

Fabrication of Optical Cavities with Femtosecond Laser Pulses

Lithium Niobate Whispering Gallery Mode Disk Resonator with High Q Factor

Fabrication of three-dimensional microdisk resonators in calcium fluoride by femtosecond laser micromachining

Fabrication of Microresonators of High Q/V Ratios Using Femtosecond Laser Micromachining

Monolithic Integration of a High-Quality Factor Lithium Niobate Microresonator with a Free-Standing Membrane Waveguide Using Femtosecond Laser Assisted Ion Beam Writing (FLAIBW)

A Simple Approach to Fiber-Based Tunable Microcavity with High Coupling Efficiency

Crystalline whispering gallery mode stabilized ring-laser

Fabrication of SiO 2 Microdisk Optical Resonator

Coupling Conditions of Disk Whispering Gallery Mode

Fano Resonances in Ultracompact Waveguide Fabry-Perot Resonator Side-Coupled Lossy Nanobeam Cavities

Research on Silica Microdisk by Wet-etching

Fabrication of high quality factor lithium niobate double-disk using a femtosecond laser

Q-factor modification of LN based WGM resonator

Fabrication of High Optical Quality Factor Free-Standing As2S3 Microdisk Resonators on a Silicon Chip

Single-Mode Silicon-On-Insulator Elliptical Microdisk Resonators with High Q Factors

Modal investigation of whispering gallery mode microtube resonators fabricated by laser machining

Fiber Taper Coupled High-Quality-Factor Planar Microdisk

Silica-based microcavity fabricated by wet etching

Fabrication of a microresonator-fiber assembly maintaining a high-quality factor by CO2 laser welding