O. Conde,A. J. Silvestre,J. C. Oliveira
Abstract:Boron carbide thin films were synthesised by laser-assisted chemical vapour deposition (LCVD), using a CO2 laser beam and boron trichloride and methane as precursors. Boron and carbon contents were measured by electron probe microanalysis (EPMA). Microstructural analysis was carried out by Raman microspectroscopy and glancing incidence X-ray diffraction (GIXRD) was used to study the crystallographic structure and to determine the lattice parameters of the polycrystalline films. The rhombohedral-hexagonal boron carbide crystal lattice constants were plotted as a function of the carbon content, and the non-linear observed behaviour is interpreted on the basis of the complex structure of boron carbide.
Keywords: Boron carbide; Laser CVD; crystallographic structure; micro-Raman spectroscopy.
What problem does this paper attempt to address?
The problem that this paper attempts to solve is to explore the influence of carbon content on the crystal structure of boron carbide (B4C) films. Specifically, the author prepared boron carbide films with different carbon contents by laser - assisted chemical vapor deposition (LCVD) technology, and studied the microstructure, chemical composition, deposition rate, and changes in the crystal structure of these films.
### Research Background and Problem Description
1. **Characteristics and Applications of Boron Carbide**:
- Boron carbide (B4C) is a material with high hardness, high melting point, and high elastic modulus, which is suitable for wear - resistant and corrosion - resistant coatings.
- It is also used as a neutron - absorbing material in the nuclear industry and a high - temperature thermoelectric energy converter.
2. **Influence of Carbon Content on Structure**:
- The carbon content of boron carbide can vary between 9 and 20 at%, and this wide range of carbon content is determined by its complex crystal structure.
- The traditional boron carbide model believes that it consists of B11C icosahedral clusters and C - B - C chains, and carbon and boron atoms can replace each other in these structural units.
3. **Research Purposes**:
- To explore the specific influence of different carbon contents on the crystal structure of boron carbide films.
- To analyze how the lattice parameters of boron carbide films change when the carbon content changes, and explain the reasons for this change.
### Experimental Methods
- Use a CO2 laser beam as a heat source, and use BCl3 and CH4 as precursors to deposit boron carbide films on quartz substrates.
- Analyze the chemical composition and crystal structure of the films by means such as electron probe microanalysis (EPMA), Raman spectroscopy, and grazing - incidence X - ray diffraction (GIXRD).
### Results and Discussion
- **Thickness and Morphology**:
- The films are uniformly gray, with good adhesion and a fine - grained structure.
- Films with different carbon contents show different thickness distributions, including Gaussian, flat - topped, and volcano - shaped.
- **Growth Kinetics**:
- The deposition rate is between 2.3 and 9.4 µg/s, indicating that mass transfer is the rate - limiting step in the deposition process.
- **Crystal Structure Analysis**:
- GIXRD results show that as the carbon content decreases, the (021) peak shifts to a lower angle, and a (104) texture appears at low carbon content.
- The hexagonal lattice parameters ch and ah calculated from GIXRD data show a non - linear relationship with the change in carbon content, which can be divided into three regions:
- **Zone I (20 - 17.5 at% C)**: ch and ah increase, which is explained as the replacement of C - B - C chains by C - B - B chains.
- **Zone II (17.5 - 13.5 at% C)**: ch and ah are almost unchanged, which is explained as the replacement of carbon in B11C icosahedra by boron.
- **Zone III (<13.5 at% C)**: ch decreases and ah increases, which is explained as the replacement of C - B - C or C - B - B chains by new four - boron - atom planar components.
- **Raman Spectroscopy Analysis**:
- The peak changes in the high - frequency region reflect the changes in the icosahedral structure, and the peak changes in the low - frequency region reflect the changes in the C - B - C chains.
- At low carbon content, C - B - C and C - B - B chains may disappear, which supports the hypothesis of four - boron - atom planar components proposed by Yakel.
### Conclusion
This study shows that the change in carbon content significantly affects the crystal structure of boron carbide films. In particular, the change in lattice parameters can be explained by the substitution of carbon and boron atoms in different structural units. These results not only help to understand the complex structure of boron carbide, but also provide a theoretical basis for optimizing its performance.