Investigation of the Surface Defects in N-Channel MOS Transistors Under Long-Term Low-Dose-Rate Irradiation

V. D. Popov
DOI: https://doi.org/10.5539/JMSR.V6N2P16
2017-03-21
Abstract:Gamma-radiation is commonly used to study surface defects in MOS transistors. Early experiments show two stages of surface-defect formation in a MOS structure under low-intensity gamma irradiation (Popov & Vin, 2014; Popov, 2016). On the first stage the defect formation take place on interface Si-SiO 2 from the oxide side. This process is described by an exponential dependence (Rashkeev et al., 2002). In the second stage “additional” surface defects are formed from the Si side. Radiation defects of silicon migrated to interface Si-SiO 2 from the semiconductor. The goal of this paper is investigation of surface-defect formation in a MOS transistor using the changing of surface electron mobility.
Engineering,Materials Science,Physics
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