Van der Waals Epitaxy of III-Nitrides and Its Applications

Qi Chen,Yue Yin,Fang Ren,Meng Liang,Xiaoyan Yi,Zhiqiang Liu
DOI: https://doi.org/10.3390/ma13173835
IF: 3.4
2020-08-31
Materials
Abstract:III-nitride semiconductors have wide bandgap and high carrier mobility, making them suitable candidates for light-emitting diodes (LEDs), laser diodes (LDs), high electron mobility transistors (HEMTs) and other optoelectronics. Compared with conventional epitaxy technique, van der Waals epitaxy (vdWE) has been proven to be a useful route to relax the requirements of lattice mismatch and thermal mismatch between the nitride epilayers and the substrates. By using vdWE, the stress in the epilayer can be sufficiently relaxed, and the epilayer can be easily exfoliated and transferred, which provides opportunities for novel device design and fabrication. In this paper, we review and discuss the important progress on the researches of nitrides vdWE. The potential applications of nitride vdWE are also prospected.
materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter,metallurgy & metallurgical engineering
What problem does this paper attempt to address?
This paper aims to solve the problems encountered in the traditional covalent epitaxial growth process of group - III nitride semiconductor materials. Specifically, these problems include: 1. **Lattice Mismatch and Thermal Mismatch**: Traditional covalent epitaxial techniques require good lattice matching and thermal matching between the substrate and the epitaxial layer. However, the lattice mismatch and thermal mismatch between group - III nitrides and common substrates (such as sapphire) are large, resulting in a large amount of stress in the epitaxial layer, thereby introducing a large number of defects and affecting the quality and performance of the thin film. 2. **Difficulty in Epitaxial Layer Peeling and Transfer**: The traditional epitaxial layer is bound to the substrate by strong chemical bonds, which makes it difficult to peel the epitaxial layer from the substrate and transfer it to other substrates, limiting the development of flexible electronic devices and wearable devices. 3. **Limitations of Large - Scale Preparation and High - Power Devices**: The small size and low thermal conductivity characteristics of single - crystal substrates limit the large - scale preparation of group - III nitride thin films and the manufacturing of high - power devices based on group - III nitrides. To overcome the above problems, this paper explores the application of van der Waals epitaxy (vdWE) technology in the growth of group - III nitrides. Van der Waals epitaxy uses weak van der Waals forces instead of strong chemical bonds to combine the epitaxial layer and the substrate, and has the following advantages: - **Release the Requirements of Lattice Mismatch and Thermal Mismatch**: The epitaxial layer can maintain its own lattice constant in the early growth stage, and the residual stress is almost negligible. - **Easy to Peel and Transfer**: The weak interaction between the epitaxial layer and the substrate makes it easy to peel the epitaxial layer from the substrate and transfer it to other substrates. - **Reuse of Substrate**: The same substrate can be used multiple times, reducing costs. The paper also discusses the latest progress of van der Waals epitaxy in the growth of group - III nitrides and looks forward to its future development direction. In particular, the paper details the application of two - dimensional materials (such as graphene) in van der Waals epitaxy, and how to optimize the epitaxial growth of group - III nitrides by adjusting growth conditions and treatment methods.