III-nitride Epitaxy by Ion Filtered Inductively Coupled Plasma MOCVD

Yi Luo,Wangyang Yu,Jian Wang,Jiadong Yu,Zixuan Zhang,Lai Wang,Zhibiao Hao,Changzheng Sun,Yanjun Han,Bing Xiong,Hongtao Li
DOI: https://doi.org/10.23919/ltb-3d.2019.8735179
2019-01-01
Abstract:Ion filtered inductively coupled plasma (IF-ICP) MOCVD is proposed for III-nitride epitaxy to reduce the required substrate temperature and ion bombardment. Nitrogen plasma and flow field in the reactor chamber are simulated and GaN films are grown by our self-made IF-ICP-MOCVD. Such epitaxy equipment not only allows various types of large-size cheap amorphous substrates, but also provides a potential way for flexible optoelectronic devices and heterogeneous integration.
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