Abstract:Microelectromechanical systems (MEMS) are the instruments of choice for high-precision manipulation and sensing processes at the microscale. They are, therefore, a subject of interest in many leading industrial and academic research sectors owing to their superior potential in applications requiring extreme precision, as well as in their use as a scalable device. Certain applications tend to require a MEMS device to function with low operational temperatures, as well as within fully immersed conditions in various media and with different flow parameters. This study made use of a V-shaped electrothermal actuator to demonstrate a novel, state-of-the-art numerical methodology with a two-way coupled analysis. This methodology included the effects of fluid-structure interaction between the MEMS device and its surrounding fluid and may be used by MEMS design engineers and analysts at the design stages of their devices for a more robust product. Throughout this study, a thermal-electric finite element model was strongly coupled to a finite volume model to incorporate the spatially varying cooling effects of the surrounding fluid (still air) onto the V-shaped electrothermal device during steady-state operation. The methodology was compared to already established and accepted analysis methods for MEMS electrothermal actuators in still air. The maximum device temperatures for input voltages ranging from 0 V to 10 V were assessed. During the postprocessing routine of the two-way electrothermal actuator coupled analysis, a spatially-varying heat transfer coefficient was evident, the magnitude of which was orders of magnitude larger than what is typically applied to macro-objects operating in similar environmental conditions. The latter phenomenon was correlated with similar findings in the literature.

Study on Safe Working Condition of the Electrothermal U-Shaped Actuator

Force Characteristics Test System for High Temperature Electromagnetic Actuators

Research on Methods of Thermal Error Compensating and Restraining in Giant Magnetostrictive Actuator

The Design of Temperature Control System in Giant Magnetostrictive Actuator

Restraining and Compensatory Methods of Thermal-output Applying in Giant Magnetostrictive Actuator

Research on Methods of Thermal Distortion Compensation and Temperature Control in Giant Magnetostrictive Actuator

Research on temperature controlling for GMA based on direct liquid cooling

Theoretical Modelling and Experimental Study of Novel Photothermal Microactuators

Thermal Characteristic and Analysis of Electro-Hydrostatic Actuator

Dynamic Thermal Characterization of MEMS Electrothermal Actuators in Air

Theoretical Modeling of Microscopic Photothermal Expansion and Experimental Study of Photothermal Microactuators

Theoretical Model and Dynamic Performance of V-Shaped Electrothermal Actuator

Coupled Finite Element-Finite Volume Multi-Physics Analysis of MEMS Electrothermal Actuators

Development of Thermal Actuators with Multi-Locking Positions

Temperature dependence modeling and experimental evaluation of a multidimensional discrete magnetostrictive actuator

Development of All Metal Electrothermal Actuator and Its Applications

Thermal protection structure design and heat transfer analysis of linear actuator in cryogenic wind tunnel

Thermal-fluid-structure coupling analysis for valve plate friction pair of axial piston pump in electrohydrostatic actuator (EHA) of aircraft

Thermal Simulation of AC Contactor

Analysis and Experimentation of Novel Bi-Directional Photo-Thermal Micro-Actuators

A thermal actuator design for a safe and arming mems interrupter