Development of Thermal Actuators with Multi-Locking Positions

J. K. Luo,Y. Zhu,Y. Q. Fu,A. J. Flewitt,S. M. Spearing,J. M. Miao,W. I. Milne
DOI: https://doi.org/10.1088/1742-6596/34/1/131
2006-01-01
Journal of Physics Conference Series
Abstract:To reduce power consumption and operation temperature for micro-thermal actuators, metal-based micro-mechanical locks with multi-locking positions were analyzed and fabricated. The micro-locks consist of two or three U-shaped thermal actuators. The devices were made by a single mask process using electroplated Ni as the active material. Tests showed that the metal based thermal actuators deliver a maximum displacement of similar to 20 mu m at a much lower temperature than that of Si-based actuators. However Ni-actuators showed a severe back bending, which increases with increasing applied power. The temperature to initiate the back bending is as low as similar to 240 degrees C. Back bending increases the distance between the two actuators, and leads to locking function failure. For practical application, Ni-based thermal actuators must be operated below 200 degrees C.
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