Abstract:Microelectromechanical systems (MEMS) are the instruments of choice for high-precision manipulation and sensing processes at the microscale. They are, therefore, a subject of interest in many leading industrial and academic research sectors owing to their superior potential in applications requiring extreme precision, as well as in their use as a scalable device. Certain applications tend to require a MEMS device to function with low operational temperatures, as well as within fully immersed conditions in various media and with different flow parameters. This study made use of a V-shaped electrothermal actuator to demonstrate a novel, state-of-the-art numerical methodology with a two-way coupled analysis. This methodology included the effects of fluid-structure interaction between the MEMS device and its surrounding fluid and may be used by MEMS design engineers and analysts at the design stages of their devices for a more robust product. Throughout this study, a thermal-electric finite element model was strongly coupled to a finite volume model to incorporate the spatially varying cooling effects of the surrounding fluid (still air) onto the V-shaped electrothermal device during steady-state operation. The methodology was compared to already established and accepted analysis methods for MEMS electrothermal actuators in still air. The maximum device temperatures for input voltages ranging from 0 V to 10 V were assessed. During the postprocessing routine of the two-way electrothermal actuator coupled analysis, a spatially-varying heat transfer coefficient was evident, the magnitude of which was orders of magnitude larger than what is typically applied to macro-objects operating in similar environmental conditions. The latter phenomenon was correlated with similar findings in the literature.

A thermal actuator design for a safe and arming mems interrupter

Research on Methods of Thermal Error Compensating and Restraining in Giant Magnetostrictive Actuator

Design of a Double-Layer Electrothermal MEMS Safety and Arming Device with a Bistable Mechanism

The Design of Temperature Control System in Giant Magnetostrictive Actuator

Development of Thermal Actuators with Multi-Locking Positions

Restraining and Compensatory Methods of Thermal-output Applying in Giant Magnetostrictive Actuator

Research on Methods of Thermal Distortion Compensation and Temperature Control in Giant Magnetostrictive Actuator

The Design of Temperature Control System in Flexure Type Giant Magnetostrictive Actuator

Analysis and Experimentation of Novel Bi-Directional Photo-Thermal Micro-Actuators

Development of All Metal Electrothermal Actuator and Its Applications

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Theoretical Modelling and Experimental Study of Novel Photothermal Microactuators

Research on Multiphysics-Driven MEMS Safety and Arming Devices

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Coupled Finite Element-Finite Volume Multi-Physics Analysis of MEMS Electrothermal Actuators

Dynamic Thermal Characterization of MEMS Electrothermal Actuators in Air

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A Novel Mumps-Compatible Single-Layer Out-Of-Plane Electrothermal Actuator

Theoretical Modeling of Microscopic Photothermal Expansion and Experimental Study of Photothermal Microactuators