Abstract:Microelectromechanical systems (MEMS) are the instruments of choice for high-precision manipulation and sensing processes at the microscale. They are, therefore, a subject of interest in many leading industrial and academic research sectors owing to their superior potential in applications requiring extreme precision, as well as in their use as a scalable device. Certain applications tend to require a MEMS device to function with low operational temperatures, as well as within fully immersed conditions in various media and with different flow parameters. This study made use of a V-shaped electrothermal actuator to demonstrate a novel, state-of-the-art numerical methodology with a two-way coupled analysis. This methodology included the effects of fluid-structure interaction between the MEMS device and its surrounding fluid and may be used by MEMS design engineers and analysts at the design stages of their devices for a more robust product. Throughout this study, a thermal-electric finite element model was strongly coupled to a finite volume model to incorporate the spatially varying cooling effects of the surrounding fluid (still air) onto the V-shaped electrothermal device during steady-state operation. The methodology was compared to already established and accepted analysis methods for MEMS electrothermal actuators in still air. The maximum device temperatures for input voltages ranging from 0 V to 10 V were assessed. During the postprocessing routine of the two-way electrothermal actuator coupled analysis, a spatially-varying heat transfer coefficient was evident, the magnitude of which was orders of magnitude larger than what is typically applied to macro-objects operating in similar environmental conditions. The latter phenomenon was correlated with similar findings in the literature.

Dynamic Thermal Characterization of MEMS Electrothermal Actuators in Air

Force Characteristics Test System for High Temperature Electromagnetic Actuators

Investigation of Dynamic Thermal Behaviors of an Electrothermal Micromirror

Dynamic Modeling of a MEMS Electro-Thermal Actuator Considering Micro-Scale Heat Transfer With End Effectors

Research on Methods of Thermal Error Compensating and Restraining in Giant Magnetostrictive Actuator

Coupled Finite Element-Finite Volume Multi-Physics Analysis of MEMS Electrothermal Actuators

Dynamic Electro-Thermal Modeling of V- and Z-shaped Electrothermal Microactuator

Response Analysis Of Mems Thermal Microactuators Based On Matlab/Simulink

An efficient electro‐thermo‐mechanical model for the analysis of V‐shaped thermal actuator connected with driven structures

An efficient <scp>electro‐thermo‐mechanical</scp> model for the analysis of V‐shaped thermal actuator connected with driven structures

Measurement of the Dynamic Response of Mems Thermal Actuators Based on Blurred Still Images by Wavelet Transform

Theoretical Modelling and Experimental Study of Novel Photothermal Microactuators

Analysis and Experimentation of Novel Bi-Directional Photo-Thermal Micro-Actuators

Dynamic characteristics of micro-optothermal expansion and optothermal microactuators

An Analytical Electrothermal Model of a 1D Electrothermal MEMS Micromirror

Temperature dependence modeling and experimental evaluation of a multidimensional discrete magnetostrictive actuator

Thermal Actuator Identification and Control for Thermomechanical Real-Time Cyber–Physical Testing

Experimental and Numerical Investigation of Thermoelectric SMA Actuator of Micro Thermal Louvers

Electrothermal Actuation of NEMS Resonators: Modeling and Experimental Validation

Thermal Characteristic and Analysis of Electro-Hydrostatic Actuator

Theoretical Model and Dynamic Performance of V-Shaped Electrothermal Actuator