Fabrication of all glass microfluidic device with superior chemical and mechanical resistances by glass molding with vitreous carbon mold

Muhammad Refatul Haq,Young Kyu Kim,Jun Kim,Jonghyun Ju,Seok-min Kim
DOI: https://doi.org/10.1088/1361-6439/ab1f99
2019-05-29
Journal of Micromechanics and Microengineering
Abstract:A glass microfluidic device with superior chemical and mechanical resistance was fabricated using acost-effective glass molding process with a vitreous carbon (VC) mold, which was prepared by thecarbonization of a replicated polymer precursor. For the development of microfluidic chips withdense microchannels on a large footprint, a defect-free VC mold is essential. In this study, a furanimprinting process, in which a patterned furan layer was imprinted (cured) on a polished furanplate, was established to minimize warpage and gas bubble defects. In addition, the proposedimprinting process markedly reduced the fabrication time of the furan precursor. For feasibilitytesting, a glass micromixer with a total channel length of 30.6 cm and footprint of 20  ×  20 mm 2was developed by glass molding with the VC mold and thermal fusion bonding. The fabricatedglass-molded micromixer was durable at an internal pressure of ~24 MPa, and there was no swellingwhen used with t...
engineering, electrical & electronic,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
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