Performance Enhancement of Field-Effect Transistors Based on In2O3 Nanofiber Networks by Plasma Treatment

Junjie Wang,Yanan Ding,Zhen Wang,Qi Tang,Qian Chen,Guoxia Liu,Fukai Shan
DOI: https://doi.org/10.1109/led.2020.3047123
IF: 4.8157
2021-02-01
IEEE Electron Device Letters
Abstract:In this report, In<sub>2</sub>O<sub>3</sub> nanofiber networks (NFNs) were prepared by electrospinning and the field-effect transistors (FETs) based on In<sub>2</sub>O<sub>3</sub> NFNs were fabricated. The effects of plasma treatment on the electrical performance of the FETs based on In<sub>2</sub>O<sub>3</sub> NFNs were investigated. It is found that the oxygen vacancy in In<sub>2</sub>O<sub>3</sub> NFNs can be tuned by the plasma treatment and the electrical performance of the FETs can be tuned accordingly. In this work, X-ray photoelectron spectroscopy was employed to investigate the chemical stoichiometry in In<sub>2</sub>O<sub>3</sub> nanofibers with respect to plasma treatment conditions. The electrical performances of the FETs based on In<sub>2</sub>O<sub>3</sub> NFNs treated by various plasma treatment conditions were systematically studied. It is found that, compared to those without O<sub>2</sub> plasma treatment, the FET based on In<sub>2</sub>O<sub>3</sub> NFNs treated by O<sub>2</sub> plasma at 120 W for 5 min exhibits high electrical performance, including the variation of threshold voltage from −22.34 to 7.81 V and current on/off ratio from $sim 10^{{3}}$ to $sim 10^{{7}}$ and a $mu _{text {FE}}$ of 1.51 cm<sup>2</sup> /Vs. This result demonstrates that moderate plasma treatment can be adopted to improve the electrical performance of the FETs based on metal oxide NFNs.
engineering, electrical & electronic
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