Intermittent O$_{\text{2}}$ Plasma Treatment as a Novel Strategy to Optimize the Electrical Properties of Nanofibers-Based Transistors

Bo He,Gang He,Qingqing Hu,Wenhao Wang,Yujiao Li,Qian Gao,Yongchun Zhang
DOI: https://doi.org/10.1109/ted.2023.3287821
IF: 3.1
2023-01-01
IEEE Transactions on Electron Devices
Abstract:In this work, intermittent O2 plasma treatment (IOPT) is demonstrated to optimize the electrical performance of In2O3-based thin-film transistors (TFTs) based on electrospinning (ES)-driven nanofiber networks (NFNs). Reducing the single-pulse time (SPT) in IOPT results in the superior device performance. At an SPT of 1 s, the suppressed defects and the modified surface morphology have been detected, achieving the significant improvement in performance, including an ${I}_{\text {ON}}/{I}_{\text {OFF}}$ of $4.75\times 10^{{7}}$ and a high field-effect mobility ( $\mu _{\text {FE}}$ ) of 4.65 cm2V−1s−1. The results of the low-frequency noise analysis further prove that the mild process environment guarantees the quality of the device itself in the case of low SPT. Furthermore, the IOPT-optimized transistors perform well in logic devices and meet the needs of application electronics. The achieved advances provide a novel and valuable process scheme improvement based on IOPT, which would promote the development of electronic modification technology in the next-generation oxide-based electronics.
engineering, electrical & electronic,physics, applied
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