Abstract:The crack propagation mechanism of KDP crystal coating is proposed and the damage evolution of KDP crystal coating is studied by multifractal method. This study employed multifractal analysis to investigate the changes in surface morphology of SiO2 anti‐reflective coatings prepared on KDP substrates using the sol‐gel method, under various conditions of ultraviolet (UV) irradiance. The coatings were successfully fabricated, and the chemical structure of the SiO2 sol was comprehensively characterized using Solid‐State Nuclear Magnetic Resonance (SSNMR) technology. Under low UV irradiance (4 J/cm2), repeated experiments revealed a crack‐induced mechanism of surface fatigue damage. Utilizing Scanning Electron Microscopy (SEM), the study discovered the induction effect of initial crack defects in UV‐damaged coatings and established a damage model. Furthermore, Atomic Force Microscopy (AFM) was used to acquire images of the coatings' surface morphology at different damage levels, which were analyzed using the multifractal spectrum f(α). This analysis confirmed the multifractal nature of the coatings both before and after damage. This study identified significant effects of UV irradiation on the width of the multifractal spectrum and Δf, indicating that the SiO2 anti‐reflective coatings exhibit multifractal characteristics under various damage states. The coatings displayed a pattern of decreasing and then increasing singularity spectrum width, height distribution unevenness, and surface roughness with increasing damage. This study demonstrates that multifractal analysis is an effective tool for describing the complexity of the surface morphology of sol‐gel‐derived anti‐reflective coatings for the first time and for validating their multifractal properties across different stages of UV damage. Highlights Damage dynamic process of KDP crystal sol‐gel coating was described by SEM&AFM The crack propagation mechanism of sol‐gel coating under UV radiation is proposed; The damage evolution of sol‐gel coating was described by multifractal analysis.

Study on UV-laser fatigue damage of sol-gel antireflective coating using XPS and slow positron beam Doppler broadening spectrum

Damage analysis and mechanism study of sol–gel coating over KDP crystal under multi-pulse of laser irradiation at low flux

Damage regularity and multifractal analysis of sol‐gel reflection coating of KDP crystal under low UV irradiation flux

Comparative Study on Cracking Behavior of Sol-Gel Silica Antireflective Coating for High-Powered Laser System

Investigating the material properties of HfO2/SiO2-based anti-reflection coatings during 1064 nm laser-induced breakdown in air and vacuum conditions

Laser-induced damage mechanism of the sol–gel single-layer SiO2 acid and base thin films

Fatigue Effect of Hafnia/silica High-Reflective Coatings under Multiple Laser Pulses at 1064 Nm

Laser Damage Induced by Contamination Particles on Coated Optical Components

Quasi-in-situ characterization and laser damage investigation of flaws in silica antireflection coatings

Study of micron-scale defects in optical coatings for high-power lasers deposited by ion beam sputtering

Non-destructive evaluation of UV pulse laser-induced damage performance of fused silica optics

Material migration and damage characteristics of fused silica optical surface treated by CO 2 laser/short – pulse ultraviolet laser

Study of simulation and experimental on the damage of stray light absorbing function films induced by nanosecond laser

Experimental Research of Laser-Induced Damage Mechanism of the Sol-Gel SiO2 and IBSD SiO2 Thin Films

Experimental Characterization of Damage and Spallation of SiO2 Coatings During Thermal Cycling Process

A Study on the Surface Quality and Damage Properties of Single-Crystal Silicon Using Different Post-Treatment Processes

Study of Laser-Irradiated Thin Films

Experimental research of laser-induced damage of the monolayer ZrO2 PVD and sol–gel films

Concentration Characterization of Underlying Intrinsic Defects Accompany with Surface Structural Defects and Their Effect on Laser Damage Resistance

Contrast Study of Laser-induced Damage of Monolayer SiO2 and ZrO2 Films

Effect of Laser Conditioning on Surface Modification and Laser Damage Resistance of SiO2 Antireflection Film