Abstract:Various defects during the manufacture of a high-energy laser monocrystalline silicon reflector will increase the energy absorption rate of the substrate and worsen the optical properties. Micron-scale or larger manufacturing defects have been inhibited by mechanism study and improvement in technology, but the substrate performance still fails to satisfy the application demand. We focus on the changes in the optical properties affected by nanoscale and Angstrom lattice defects on the surface of monocrystalline silicon and acquire the expected high reflectivity and low absorptivity through deterministic control of its defect state. Based on the first principles, the band structures and optical properties of two typical defect models of monocrystalline silicon—namely, atomic vacancy and lattice dislocation—were analyzed by molecular dynamics simulations. The results showed that the reflectivity of the vacancy defect was higher than that of the dislocation defect, and elevating the proportion of the vacancy defect could improve the performance of the monocrystalline silicon in infrared (IR) band. To verify the results of simulations, the combined Ion Beam Figuring (IBF) and Chemical Mechanical Polishing (CMP) technologies were applied to introduce the vacancy defect and reduce the thickness of defect layer. After the process, the reflectivity of the monocrystalline silicon element increased by 5% in the visible light band and by 12% in the IR band. Finally, in the photothermal absorption test at 1064 nm, the photothermal absorption of the element was reduced by 80.5%. Intense laser usability on the monocrystalline silicon surface was achieved, and the effectiveness and feasibility of deterministic regulation of optical properties were verified. This concept will be widely applied in future high-energy laser system and X-ray reflectors.

Defect Analysis of UV High-Reflective Coatings Used in the High Power Laser System

Analysis of Laser Intensification by Nodular Defects in Mid-Infrared High Reflectance Coatings

Researches on Laser Damage Resistance of Optical Films

Numerical Analysis of Thermal Response of Mid-Infrared High Reflectance Coating under Different Laser Irradiation Angles

Laser-induced Heating of Mid-Infrared High Reflectance Coatings

Interface and Defects Engineering for Multilayer Laser Coatings

Fatigue Effect of Hafnia/silica High-Reflective Coatings under Multiple Laser Pulses at 1064 Nm

Study of micron-scale defects in optical coatings for high-power lasers deposited by ion beam sputtering

Analysis of the Effects on Ultra-Short Laser Pulse Beam Quality Caused by Errors in Optical Systems

Theoretic Analysis And Numerical Simulation On Quantitative Evaluation Of Interface Strength By Pulsed Laser Technology

Interaction Analysis of Different Defects with Laser Ultrasonic Sound Waves and Defect Characterization

Analysis of the Crack Penetration/deflection at the Interfaces in the Intelligent Coating System Utilizing Virtual Crack Closure Technique

Investigation of UV, ns-laser damage resistance of hafnia films produced by electron beam evaporation and ion beam sputtering deposition methods

Wavefront Error Modeling and Control Method for Large Aperture Optical Unit in High Power Solid-State Laser

Numerical simulation on the damage behaviors of optical mirrors induced by film defects in high-power CW laser

Enhancement of the Load Capacity of High-Energy Laser Monocrystalline Silicon Reflector Based on the Selection of Surface Lattice Defects

Behavior Analysis and Threshold Prediction of Laser-Induced Damage in Fused Silica Based on 2-D Thermal Diffusion Model

Laser Resistance Dependence of Interface for High-Reflective Coatings Studied by Capacitance-Voltage and Absorption Measurement

Surface Error Modeling of Mounted Large Optics in High Power Laser System

Establishment and Analysis of the Diffraction Bidirectional Reflection Distribution Function Model for Surface Defects

Research of On-Line Monitoring Technology Based on Laser Triangulation for Surface Morphology of Extreme High-Speed Laser Cladding Coating