Abstract:In the next years, one of the biggest challenges for optoelectronic devices will be the necessity to provide a suitable and reliable alternative to the use of transparent conducting oxide (TCO) like Indium Thin Oxide (ITO) as transparent electrodes. We recently demonstrated a promising fully laser-based method to produce transparent conductive electrodes only made of pure carbon materials. In a first step, we use the Pulsed Laser Deposition (PLD) to synthetize high performance Diamond-Like Carbon (DLC), an amorphous pure carbon material composed of a mixture of sp 2 (graphitic) sp 3 (diamond) hybridized carbon atoms. DLC thin films show very interesting properties comparable to those of diamond, like a high transparency in the visible range, high wear resistance, biocompatibility, chemical inertness and high electrical insulation. DLC also presents one particularity compared to diamond which its relative high opacity in the UV range. This feature is used in a second step to perform an UV laser surface treatment to graphitize the very first atomic layers of the DLC thin film. DLC opacity at treatment wavelength will help to restrict the laser interaction at the surface and will break dominant diamond bindings, allowing carbon atoms to reorganize into its stable form, forming by their way a Thin Graphitic Layer (TGL). Raman spectroscopy (RS) and X-ray Photoemission Spectroscopy (XPS) perform before and after laser annealing clearly demonstrate the DLC surface graphitization kinetic. Transmittance and surface conductivity measurement show very promising results and performances that can clearly compete with those of ITO. In addition to all these analyses, this pure laser process will be fully compatible with standard microelectronic technological steps and will have a low ecological footprint compared to other much heavier processes.

Silver-Doped Diamond-Like Carbon (DLC:Ag) Nanocomposite Films for Solar Tracking Applications

Electronic-Properties of Semiconducting Diamond-Like Carbon Diamond

Morpho-structural and optoelectronic properties of diamond like carbon–germanium (DLC-Ge) composite thin films produced by magnetron sputtering

Preparation and Field Emission Property of Nanodiamond-Cluster-embedded Diamondlike Carbon Film

Diamond-like carbon protective anti-reflection coating for Si solar cell

Characteristics of Diamond-Like Carbon Films Fabricated by Using a Filtered Vacuum Arc System for Dye-Sensitized Solar Cells

Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

Microstructure and mechanical properties of Ag-containing diamond-like carbon films in mid-frequency dual-magnetron sputtering

RF magnetron sputtered deposited metal-doped diamond like carbon thin films: structural, morphological, mechanical, and optical properties

Optical Study of Low Energy Ion-Beam-Assisted Deposited Diamond-Like Carbon Films

Comprehensive structural, nanomechanical and tribological evaluation of silver doped DLC thin film coating with chromium interlayer (Ag-DLC/Cr) for biomedical application

Electrochemical Characterization of Diamond Like Carbon Thin Films

Investigation of laser-induced changes in structural and optoelectrical properties of pulsed laser-deposited Diamond-Like Carbon layers

Effects of nanocrystalline silver incorporation on sliding tribological properties of Ag-containing diamond-like carbon films in multi-ion beam assisted deposition

Evaluation of Diamond-Like Carbon Films Electrodeposited on an Al Substrate from the Liquid Phase with Pulse-Modulated Power

Effect of the thickness on electrical resistance of thin diamond-like carbon coatings on silicon substrate

Patterning of diamond like carbon films for sensor applications using silicon containing thermoplastic resist (SiPol) as a hard mask

The properties of N-doped diamond-like carbon films prepared by helicon wave plasma chemical vapor deposition

Structural Characterization And Properties Enhancement Of Diamond-Like Carbon-Films Synthesized Under Low-Energy Ne+ Bombardment

Influence of Silver Incorporation on Toughness Improvement of Diamond-Like Carbon Film Prepared by Ion Beam Assisted Deposition

Analysis of Mechanical and Tribological Properties of Silicon Incorporated Diamond like Carbon Nanocomposite Coating