Abstract:In the next years, one of the biggest challenges for optoelectronic devices will be the necessity to provide a suitable and reliable alternative to the use of transparent conducting oxide (TCO) like Indium Thin Oxide (ITO) as transparent electrodes. We recently demonstrated a promising fully laser-based method to produce transparent conductive electrodes only made of pure carbon materials. In a first step, we use the Pulsed Laser Deposition (PLD) to synthetize high performance Diamond-Like Carbon (DLC), an amorphous pure carbon material composed of a mixture of sp 2 (graphitic) sp 3 (diamond) hybridized carbon atoms. DLC thin films show very interesting properties comparable to those of diamond, like a high transparency in the visible range, high wear resistance, biocompatibility, chemical inertness and high electrical insulation. DLC also presents one particularity compared to diamond which its relative high opacity in the UV range. This feature is used in a second step to perform an UV laser surface treatment to graphitize the very first atomic layers of the DLC thin film. DLC opacity at treatment wavelength will help to restrict the laser interaction at the surface and will break dominant diamond bindings, allowing carbon atoms to reorganize into its stable form, forming by their way a Thin Graphitic Layer (TGL). Raman spectroscopy (RS) and X-ray Photoemission Spectroscopy (XPS) perform before and after laser annealing clearly demonstrate the DLC surface graphitization kinetic. Transmittance and surface conductivity measurement show very promising results and performances that can clearly compete with those of ITO. In addition to all these analyses, this pure laser process will be fully compatible with standard microelectronic technological steps and will have a low ecological footprint compared to other much heavier processes.

Morpho-structural and optoelectronic properties of diamond like carbon–germanium (DLC-Ge) composite thin films produced by magnetron sputtering

Electronic-Properties of Semiconducting Diamond-Like Carbon Diamond

Silver-Doped Diamond-Like Carbon (DLC:Ag) Nanocomposite Films for Solar Tracking Applications

Investigation of laser-induced changes in structural and optoelectrical properties of pulsed laser-deposited Diamond-Like Carbon layers

Structural Characterization And Properties Enhancement Of Diamond-Like Carbon-Films Synthesized Under Low-Energy Ne+ Bombardment

The Optical Properties of Band-Gap-modulated Diamond-Like Carbon Thin Films

Electrochemical Characterization of Diamond Like Carbon Thin Films

Preparation and Field Emission Property of Nanodiamond-Cluster-embedded Diamondlike Carbon Film

Structural and Tribological Properties of Diamond-Like Nanocomposite Thin Films

Dielectric Properties of Composite Diamond Films

Deposition of nano-diamond-like carbon films by an atmospheric pressure plasma gun and diagnostic by optical emission spectrum on the process

RF magnetron sputtered deposited metal-doped diamond like carbon thin films: structural, morphological, mechanical, and optical properties

Properties and structures of diamond-like carbon film deposited using He, Ne, Ar/methane mixture by plasma enhanced chemical vapor deposition

Effect of Molybdenum Concentration and Deposition Temperature on the Structure and Tribological Properties of the Diamond-like Carbon Films

Tribological Properties of Graded Metal-doped and Nanoscale Multilayered Modulation Diamond-like Carbon Films

Mechanical and Tribological Properties of Diamond-Like Carbon Films Deposited by Electron Cyclotron Resonance Microwave Plasma Chemical Vapor Deposition

Diamond and diamond-like carbon MEMS

Field Emission from Nanodiamonds Embedded Diamond-Like Carbon Films

Electrodeposition Of Diamond-Like Amorphous Carbon Films On Si From N,N-Dimethylformamide

Nano-Scratch Response of Diamond-Like Carbon Film Deposited by Pulsed Direct Current Magnetron Sputtering