Abstract:In the next years, one of the biggest challenges for optoelectronic devices will be the necessity to provide a suitable and reliable alternative to the use of transparent conducting oxide (TCO) like Indium Thin Oxide (ITO) as transparent electrodes. We recently demonstrated a promising fully laser-based method to produce transparent conductive electrodes only made of pure carbon materials. In a first step, we use the Pulsed Laser Deposition (PLD) to synthetize high performance Diamond-Like Carbon (DLC), an amorphous pure carbon material composed of a mixture of sp 2 (graphitic) sp 3 (diamond) hybridized carbon atoms. DLC thin films show very interesting properties comparable to those of diamond, like a high transparency in the visible range, high wear resistance, biocompatibility, chemical inertness and high electrical insulation. DLC also presents one particularity compared to diamond which its relative high opacity in the UV range. This feature is used in a second step to perform an UV laser surface treatment to graphitize the very first atomic layers of the DLC thin film. DLC opacity at treatment wavelength will help to restrict the laser interaction at the surface and will break dominant diamond bindings, allowing carbon atoms to reorganize into its stable form, forming by their way a Thin Graphitic Layer (TGL). Raman spectroscopy (RS) and X-ray Photoemission Spectroscopy (XPS) perform before and after laser annealing clearly demonstrate the DLC surface graphitization kinetic. Transmittance and surface conductivity measurement show very promising results and performances that can clearly compete with those of ITO. In addition to all these analyses, this pure laser process will be fully compatible with standard microelectronic technological steps and will have a low ecological footprint compared to other much heavier processes.

The Optical Properties of Band-Gap-modulated Diamond-Like Carbon Thin Films

Optical Quantum-Size Effects in Diamond-Like Carbon Superlattice Structures

Electronic-Properties of Semiconducting Diamond-Like Carbon Diamond

Optical Study of Low Energy Ion-Beam-Assisted Deposited Diamond-Like Carbon Films

Optical and Electronic-Properties of Amorphous Diamond

Modelling of the Electron Field Emission Process in Polycrystalline Diamond-Like Carbon Thin Films

Smooth Thin-Film C/Diamond Membranes With Controllable Optical Band-Gaps

Optical-Properties of Amorphous C/Diamond Thin-Films

Superlattice Structures Based on Amorphous Carbon

Electronic and optical applications of diamond-like carbon

Modeling of the Electron Field Emission Process in Polycrystalline Diamond and Diamond-Like Carbon Thin Films

Effect of Thickness on Structures of Ultrathin Diamond-Like Carbon Films

Effect of the thickness on electrical resistance of thin diamond-like carbon coatings on silicon substrate

The Electronic Band -Gap of Polycrystalline Diamond and Tetrahedral Amorphous Carbon by EELS in a STEM.

Fabrication and applications of the optical diamond-like carbon films: a review

Use of space-charge-limited current to evaluate the electronic density of states in diamond-like carbon thin films

Optical and Electrical Properties of Diamond-like-Carbon Coatings Prepared by Electron Cyclotron Resonance Ion Beam Deposition Process

First Principles on the Structure and Electronic Properties of Vertically Regulated Two-Dimensional Cubic Boron Nitride and Diamond Like Carbon Sandwich Heterostructures

Optical and electrical properties of synthesized reactive rf sputter deposited boron-rich and boron-doped diamond-like carbon thin films

Investigation of laser-induced changes in structural and optoelectrical properties of pulsed laser-deposited Diamond-Like Carbon layers

Morpho-structural and optoelectronic properties of diamond like carbon–germanium (DLC-Ge) composite thin films produced by magnetron sputtering