Tribological Properties of Graded Metal-doped and Nanoscale Multilayered Modulation Diamond-like Carbon Films

陈新春,彭志坚,付志强,王成彪
DOI: https://doi.org/10.3969/j.issn.1007-9289.2010.02.007
2010-01-01
China surface engineering
Abstract:Graded tungsten-doped diamond-like carbon (DLC) composite thin films and nanoscale multilayered chromium modulated DLC composite thin films with multicomponent transition layers were fabricated, respectively, by using cathodic vacuum arc and ion beam assisted DC magnetron sputtering technique, and the influences of the doped amount of metal W and the individual thickness of Cr modulation layer on the composition, structure and properties of the as-prepared DLC film samples were investigated. It was found that the adhesion strengths between the films and substrates of both kinds of samples were dramatically enhanced due to the alleviation of their intrinsic compressive stresses through multicomponent and multilayered structure, and the comprehensive wear-resistant properties of the as-prepared samples were obviously improved.
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