High external quantum efficiency green light emitting diodes on stress-manipulated AlNO buffer layers

Aimin Wang,Kaixuan Chen,Jinchai Li,Junyong Kang,Jin-Chai Li
DOI: https://doi.org/10.1109/jphot.2022.3140775
IF: 2.4
2022-01-01
IEEE Photonics Journal
Abstract:We demonstrated high-brightness InGaNGaN green light emitting diodes (LEDs) with ex-situ sputtered stress-manipulated AlNO buffer on 4-inch patterned sapphire substrates. The lattice constant of the AlNO buffer was adjusted by oxygen flow. As a result, the dislocation density and the in-plane compressive stress caused by lattice mismatch were greatly reduced, while the interface quality of the InGaNGaN multiple quantum wells and the uniformity of the indium composition were greatly improved. At 20Acm2, the external quantum efficiency and wall plug efficiency of the 526.4-nm-green LEDs grown on the sputtered AlNO buffer reached 46.1 and 41.9, which were both higher than reported values.
engineering, electrical & electronic,optics,physics, applied
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