Development of electro-copper plating with nanodiamonds for electronic interconnects in advanced packaging

Tomoaki Mahiko,Taro Yoshikawa,Makoto Nagata
DOI: https://doi.org/10.35848/1347-4065/ab9588
IF: 1.5
2020-06-15
Japanese Journal of Applied Physics
Abstract:In order to advance a technology suitable for fabrication of fine pitch interconnects using copperelectro plating, we developed the composite of copper (Cu) and nanodiamonds (NDs). Electro-Cuplating coatings obtained by adding NDs to the electro-Cu plating bath were demonstrated to maintaina smaller crystallite size compared to the plating coatings that NDs were not added. Moreover, incase of the electro-Cu plating coatings obtained by adding NDs, smoothness of the plating coatingsurface and hardness of the plating coating with time course have been improved, and the electroconductivity has been improved by up to 16%. The composite material of electro-Cu plating and NDswhich we developed showed the potential that it could be expected for application to fine pitchinterconnects in an advanced packaging technology.
physics, applied
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