Nano-Modification Fine-Pitch All-Copper Interconnect Technology Based on Spark Ablation

Yangbin Fang,Yu Zhang,Junyu He,Ranyuan Zhang,Shangj in Zhang,Chengqiang Cui,Guannan Yang,Guanghan Huang
DOI: https://doi.org/10.1109/icept63120.2024.10668801
2024-01-01
Abstract:This study precisely targeted a key area and proposed an all-copper interconnect technology based on spark ablation assistance, utilizing a direct deposition bonding process without masks to achieve fine-pitch interconnection between substrates and chips. The paper designed a test structure with daisy chain protrusion size/spacing of 40/40μm, where the nano-copper-modified analog substrates and chips were thermally bonded to obtain an interconnection joint.
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