Improved electrical properties in AlGaN∕GaN heterostructures using AlN∕GaN superlattice as a quasi-AlGaN barrier

Y. Kawakami,A. Nakajima,X. Q. Shen,G. Piao,M. Shimizu,H. Okumura
DOI: https://doi.org/10.1063/1.2746417
IF: 4
2007-06-11
Applied Physics Letters
Abstract:The authors report the electrical properties of two-dimensional electron gas (2DEG) in AlGaN∕GaN heterostructures using AlN∕GaN superlattices working as a quasi-AlGaN barrier layer. It is found that the electrical properties (2DEG mobility and sheet carrier density) in the quasi-AlGaN∕GaN heterostructure are greatly improved compared to those in the conventional alloy-AlGaN∕GaN one at the high Al composition more than 0.35. The improved 2DEG properties result in the reduction of the sheet resistance to as low as 172Ω∕□, which is extremely important for the high power and high frequency device application. Theoretical calculations clearly indicate that the quasi-AlGaN barrier plays an important role in enhancing the confinement of the carrier at the quasi-AlGaN∕GaN interface.
physics, applied
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