Optical Pressure Measurement Principle System

Limin Gao,Ruiyu Li,Bo Liu

DOI: https://doi.org/10.5772/64008

2016-07-20

Abstract:Optical Pressure Measurement Principle System | InTechOpen, Published on: 2016-07-20. Authors: Limin Gao, Ruiyu Li and Bo Liu

What problem does this paper attempt to address?

High Sensitivity Photoelectric Pressure Sensor Based on A Monolithic Dual Photodiode

WM Zheng,TN Cao,JX Qian

DOI: https://doi.org/10.1117/12.252106

1996-01-01

Abstract:This paper presents a novel and simple photoelectric pressure sensor. The pressure sensing element is a linear capsule with a miniature opaque windowshade on its center. The photo detector is a monolithic dual photodiode. The two photodiodes of this detector are used as reference photodiode and the detection photodiode, respectively. Through this differential structure, the displacement of the windowshade caused by the fluid pressure is picked up, while the influence of the environmental perturbation can be eliminated. The nonlinearity error can be corrected by a single chip computer. This sensor has excellent stability, linearity and high sensitivity as well as good manufacturability. Experiment results show that the minimum detectable pressure is less than 20 Pa with the measurement range of 0 approximately 6 HZ, the nonlinearity error without correction is less than +/- 0.3% within the range of 6000 Pa.
Optical measurement of small channel two-phase flow based on PSD principle

WANG Bao-Liang,XU Xiao-Hui,JI Hai-Feng,HUANG Zhi-Yao,LI Hai-Qing

2010-01-01

Kung Cheng Je Wu Li Hsueh Pao/Journal of Engineering Thermophysics

Abstract:Based on PSD principle, a new optical measurement method for two-phase flow in small channel is proposed. With the ray deflection characteristics in the convex-concave surface of the two phases of two-phase, the proposed method can distinguish the phase distribution on the both sides of the interface and identify the flow direction according to the output of the photocell. Experimental results show that the presented optical method is effective and can be applied to the two-phase flow measurement in small channel.
&Lt;title>distributed Optical Fiber Pressure Sensor</title>

Hongbo Lu,Xingchun Chu,Wenjian Luo,Tingzheng Shen,Huayong Yang

DOI: https://doi.org/10.1117/12.318169

1998-01-01

Abstract:A new kind of distributed fiber optic sensor is described in the paper. On the basis of mode coupling between two orthogonal fundamental modes of HiBi polarization- maintaining fiber, a new method is developed to locate the mode coupling point caused by external pressure applied on the fiber.
Pressure Sensor Based on Optical Resonator in a Compact Plasmonic System

Zhao Chen,Xinxin Ma,Shijie Zhang,Tong Li,Yilin Wang,Zhi-Ling Hou

DOI: https://doi.org/10.1109/jsen.2023.3348534

IF: 4.3

2024-02-16

IEEE Sensors Journal

Abstract:Optical pressure sensors have the advantage of being impervious to electromagnetic interference. However, it remains difficult to explore the quantitative relationship between the optical response and the exerted applied pressure. Here, for the first time, the quantitative relationship between the deformation of optical resonator and the applied pressure and the optical response characteristics of the structure are investigated in detail by finite element method, and an ultracompact optical pressure sensor with a high sensitivity ~10.2 nm/MPa is demonstrated. Simulation results show that the maximum deformation of the optical resonator is linearly related to the applied pressure and has a limit value at a fixed input pressure as the range of pressure applied increases. The results also imply that the external force can induce a redshift in the resonance wavelength in addition to generating intriguing phenomena like Fano resonance. These observations contribute to the enhancement and diversification of the optical response within the system. The special features of our suggested structure are applicable in optical property change detection under different pressures, chemical high-pressure experimental measurement, and study of chemical reaction kinetics process.

engineering, electrical & electronic,instruments & instrumentation,physics, applied
Nondestructive Pressure Measurement in Vessels Using Rayleigh Waves and L-Cr Waves

Zhangwei Ling,Hongjian Zhang,Hongliang Zhou

DOI: https://doi.org/10.1109/tim.2009.2012936

IF: 5.6

2009-01-01

IEEE Transactions on Instrumentation and Measurement

Abstract:In order to avoid the potential safety problems caused by applying traditional pressure measurement methods in vessels, a nondestructive pressure measurement method is presented. This method utilizes ultrasonic Rayleigh waves and critically refracted longitudinal waves (LCr waves). Considering the effect of pressure and temperature of the vessel on both the wave speed and the propagation distance of ultrasonic, a modified model of pressure measurement is deduced. Further, according to this model, a reference method for temperature compensation, without temperature measurement, is presented. The relationship between the reference transit time delay and pressure is established through this method. In our experiment, the reference method is applied to a nitrogen gas cylinder whose working pressure is 15 Mpa. Experimental results show that the reference transit time delay is proportional to pressure change. Comparison between the reference method and the commonly used temperature compensation method shows that the reference method yields better performance.
Automatic Distributed Fiber Optic Pressure-Measuring System

YJ PAN,ZG LI,J ZOU,SL HUANG

DOI: https://doi.org/10.1117/12.144159

1993-01-01

Abstract:A method for measuring a distributed external pressure field along an optic fiber is discussed, which is based on the principle of mode-coupling of polarization-maintaining fiber and optical path compensation in the interference of two beams from a broadband light source. A modified Mach-Zehnder interferometer is used to process the optical signal representing the distributed pressure information, and a polarization light heterodyne detecting technique is used to improve the signal-to-noise ratio and to eliminate the influences of light source fluctuation and background light. For the automatic measurement of the distributed pressure information, an A/D and interface circuit is designed. Under the control of the microcomputer, the arm of the interferometer with an optical path scanning setup scans a distance corresponding to the length of the fiber, then the information of the pressure field is obtained. The experimental results have shown that the measuring system has a high measurement accuracy and a rather large pressure measuring range (10 g/mm - 500 g/mm).
An Optical Fiber Pressure Sensor Based on F-P Interferometry and Intensity Demodulation

DENG Yuan-long,ZHAO Xiao-li,LI Xue-jin,GENG You-fu,HONG Xue-ming,QIU Cheng-jun

DOI: https://doi.org/10.3969/j.issn.1000-2618.2011.01.002

2011-01-01

Abstract:An optical fiber pressure sensor was designed,fabricated and characterized.It employed a Fabry-Perot (F-P) interferometer and simple intensity-demodulation technology.A square silicon cup processed by anisotropic etching serves as sensitive element for the better consistency than that of circular diaphragm.A large area ratio of the moving mirror to the stationary one is introduced to reduce the nonlinearity due to the non-planarity of the deflection.Reference light generated from a 2×2 optical fiber coupler is used to decrease the influence of intensity variations of the light source.Single-value measurement was achieved under the pressure range from 0 to 38 kPa.The experimental results demonstrate an upmost relative sensitivity of 0.7%/kPa and a reasonable repeatability,consisting well with the theoretical analysis and simulation.A new method of multi-wave or multi-sensor is presented to expand the measurement range with high sensitivity.
High sensitivity optical fiber pressure sensor based on thin-walled oval cylinder

Zheng Hong-kun,Zhao Yong,Zhao Qiang,Lv Ri-qing

DOI: https://doi.org/10.1016/j.sna.2020.112042

2020-01-01

Abstract:The diagram of pressure calibration system
The Mechanism of Errors Generated from Slug Inside Pinhole in Pressure Measurement

Weiting Liu,Jialu Li,Liang Hu,Rui Su,Xin Fu

DOI: https://doi.org/10.2139/ssrn.4365973

2023-01-01

Abstract:Pinholes are holes drilled perpendicularly to the surface, and manometric systems are connected behind. If the wall is hydrophilic, menisci form inside the pinhole. The path from the wall surface to the sensor die will contain both gas and liquid slug serving as a hybrid pressure-transmitting media. This article sheds light on the measurement errors resulting from the heterogeneous pressure-transmission media. The errors are explored by analyzing dynamic performance of menisci. It is found that surface tension and liquid viscosity act as spring and damper respectively, showing mass-spring-damper characteristics. There is also a phase lag when pressure wave passes through the two-phase pressure transmitting medium, and for a fixed pinhole the resonant frequency depends on the slug length. The result shows that the pinhole pressure readings deviate tremendously from the true pressure value at certain frequency band, and error arisen from slug is underestimated and little attentions are paid yet.
Dynamic Distributed Pressure Measurement Using Frequency-Agile Fast BOTDA

Liqiang Qiu,Dengwang Zhou,Ying Wang,Qi Chu,Zongda Zhu,Tianfu Li,Yongkang Dong

DOI: https://doi.org/10.1109/jsen.2021.3117992

IF: 4.3

2021-11-15

IEEE Sensors Journal

Abstract:A distributed pressure sensor is proposed and designed for dynamic pressure measurement by using frequency-agile fast Brillouin optical time-domain analysis (BOTDA). A double coated single-mode fiber (SMF) is used as the sensing fiber because of its 1500- <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="9.503ex" height="2.009ex" style="vertical-align: -0.338ex;" viewBox="0 -719.6 4091.5 865.1" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-6D" x="0" y="0"></use> <use xlink:href="#MJMATHI-75" x="878" y="0"></use> <use xlink:href="#MJMATHI-74" x="1451" y="0"></use> <use xlink:href="#MJMATHI-65" x="1812" y="0"></use> <use xlink:href="#MJMATHI-78" x="2279" y="0"></use> <use xlink:href="#MJMATHI-74" x="2851" y="0"></use> <use xlink:href="#MJMATHI-6D" x="3213" y="0"></use></g></svg></span> thickness outer coating that can significantly improve the dependence of the Brillouin frequency shift on pressure. Then, the frequency-agile technique is used to generate frequency-agile pump pulse in BOTDA system so that a fast Brillouin gain spectrum distribution measurement can be achieved. An injection locked scheme is used as both optical filter and optical amplifier to improve the measurement accuracy. As a result, the static pressure sensitivity of the double coated fiber is −3.46 MHz/MPa with the pressure ranging from 0 to 30 MPa. Subsequently, a large dynamic range pressure measurement is performed with a sampling rate of 33.3 kHz and maximum sensing distance of 25 m. Furthermore, it is proved that the uncertainty of dynamic pressure measurement system is 0.03 MPa.<svg xmlns="http://www.w3.org/2000/svg" style="display: none;"><defs id="MathJax_SVG_glyphs"><path stroke-width="1" id="MJMATHI-6D" d="M21 287Q22 293 24 303T36 341T56 388T88 425T132 442T175 435T205 417T221 395T229 376L231 369Q231 367 232 367L243 378Q303 442 384 442Q401 442 415 440T441 433T460 423T475 411T485 398T493 385T497 373T500 364T502 357L510 367Q573 442 659 442Q713 442 746 415T780 336Q780 285 742 178T704 50Q705 36 709 31T724 26Q752 26 776 56T815 138Q818 149 821 151T837 153Q857 153 857 145Q857 144 853 130Q845 101 831 73T785 17T716 -10Q669 -10 648 17T627 73Q627 92 663 193T700 345Q700 404 656 404H651Q565 404 506 303L499 291L466 157Q433 26 428 16Q415 -11 385 -11Q372 -11 364 -4T353 8T350 18Q350 29 384 161L420 307Q423 322 423 345Q423 404 379 404H374Q288 404 229 303L222 291L189 157Q156 26 151 16Q138 -11 108 -11Q95 -11 87 -5T76 7T74 17Q74 30 112 181Q151 335 151 342Q154 357 154 369Q154 405 129 405Q107 405 92 377T69 316T57 280Q55 278 41 278H27Q21 284 21 287Z"></path><path stroke-width="1" id="MJMATHI-75" d="M21 287Q21 295 30 318T55 370T99 420T158 442Q204 442 227 417T250 358Q250 340 216 246T182 105Q182 62 196 45T238 27T291 44T328 78L339 95Q341 99 377 247Q407 367 413 387T427 416Q444 431 463 431Q480 431 488 421T496 402L420 84Q419 79 419 68Q419 43 426 35T447 26Q469 29 482 57T512 145Q514 153 532 153Q551 153 551 144Q550 139 549 130T540 98T523 55T498 17T462 -8Q454 -10 438 -10Q372 -10 347 46Q345 45 336 36T318 21T296 6T267 -6T233 -11Q189 -11 155 7Q103 38 103 113Q103 170 138 262T173 379Q173 380 173 381Q173 390 173 393T169 400T158 404H154Q131 404 112 385T82 344T65 302T57 280Q55 278 41 278H27Q21 284 21 287Z"></path><path stroke-width="1" id="MJMATHI-74" d="M26 385Q19 392 19 395Q19 399 22 411T27 425Q29 430 36 430T87 431H140L159 511Q162 522 166 540T173 566T179 586T187 603T197 615T211 624T229 626Q247 625 254 615T261 596Q261 589 252 549T232 470L222 433Q222 431 272 431H323Q330 424 330 420Q330 398 317 385H210L174 240Q135 80 135 68Q135 26 162 26Q197 26 230 60T283 144Q285 150 288 151T303 153H307Q322 153 322 145Q322 142 319 133Q314 117 301 95T267 48T216 6T155 -11Q125 -11 98 4T59 56Q57 64 57 83V101L92 241Q127 382 128 383Q128 385 77 385H26Z"></path><path stroke-width="1" id="MJMATHI-65" d="M39 168Q39 225 58 272T107 350T174 402T244 433T307 442H310Q355 442 388 420T421 355Q421 265 310 237Q261 224 176 223Q139 223 138 221Q138 219 132 186T125 128Q125 81 146 54T209 26T302 45T394 111Q403 121 406 121Q410 121 419 112T429 98T420 82T390 55T344 24T281 -1T205 -11Q126 -11 83 42T39 168ZM373 353Q367 405 305 405Q272 405 244 391T199 357T170 316T154 280T149 261Q149 260 169 260Q282 260 327 284T373 353Z"></path><path stroke-width="1" id="MJMATHI-78" d="M52 289Q59 331 106 386T222 442Q257 442 286 424T329 379Q371 442 430 442Q467 442 494 420T522 361Q522 332 508 314T481 292T458 288Q439 288 427 299T415 328Q415 374 465 391Q454 404 425 404Q412 404 406 402Q368 386 350 336Q290 115 290 78Q290 50 306 38T341 26Q378 26 414 59T463 140Q466 150 469 151T485 153H489Q504 153 504 145Q504 144 502 134Q486 77 440 33T333 -11Q263 -11 227 52Q186 -10 133 -10H127Q78 -10 57 16T35 71Q35 103 54 123T99 143Q142 143 142 101Q142 81 130 66T107 46T94 41L91 40Q91 39 97 36T113 29T132 26Q168 26 194 71Q203 87 217 139T245 247T261 313Q266 340 266 352Q266 380 251 392T217 404Q177 404 142 372T93 290Q91 281 88 280T72 278H58Q52 284 52 289Z"></path></defs></svg>

engineering, electrical & electronic,instruments & instrumentation,physics, applied
A Compact Optical MEMS Pressure Sensor Based on Fabry–Pérot Interference

Yonghong Qi,Minghui Zhao,Bo Li,Ziming Ren,Bing Li,Xueyong Wei

DOI: https://doi.org/10.3390/s22051973

IF: 3.9

2022-03-03

Sensors

Abstract:Pressure sensors have important prospects in wind pressure monitoring of transmission line towers. Optical pressure sensors are more suitable for transmission line towers due to its anti-electromagnetic interference. However, the fiber pressure sensor is not a suitable choice due to expensive and bulky. In this paper, a compact optical Fabry–Pérot (FP) pressure sensor for wind pressure measurement was developed by MEMS technology. The pressure sensor consists of a MEMS sensing chip, a vertical-cavity surface-emitting laser (Vcsel), and a photodiode (PD). The sensing chip is combined with an FP cavity and a pressure sensing diaphragm which adopts the square film and is fabricated by Silicon on Insulator (SOI) wafer. To calibrate the pressure sensor, the experimental platform which consists of a digital pressure gauge, a pressure loading machine, a digital multimeter, and a laser driver was set up. The experimental results show that the sensitivity of the diaphragm is 117.5 nm/kPa. The measurement range and sensitivity of the pressure sensor are 0–700 Pa and 115 nA/kPa, respectively. The nonlinearity, repeatability, and hysteresis of the pressure sensor are 1.48%FS, 2.23%FS, and 1.59%FS, respectively, which lead to the pressure accuracy of 3.12%FS.

engineering, electrical & electronic,chemistry, analytical,instruments & instrumentation
Nondestructive Pressure Measurement in Vessels Using Rayleigh Waves and <formula> <tex>$l_{\rm CR}$</tex> </formula> Waves

Zhangwei Ling,Hongliang Zhou,Hongjian Zhang

DOI: https://doi.org/10.1109/tim.2008.2012936

IF: 5.6

2009-01-01

IEEE Transactions on Instrumentation and Measurement

Abstract:A new nondestructive pressure-measurement method that can avoid potential safety problems caused by applying traditional pressure-measurement methods in vessels is presented. This method utilizes ultrasonic Rayleigh waves and critically refracted longitudinal waves ( L CR waves). The change in pressure induces a change in the stresses in the vessel's wall. According to the acoustoelastic principle, variations in stress affect the wave velocity. Meanwhile, the velocity of ultrasonic waves can also be affected by the change in temperature. Considering the effect of the pressure and temperature of the vessel on both the wave velocity and propagation distance of the ultrasonic waves, the relationship between ultrasonic transit time delay and both the pressure and temperature change is established. Furthermore, a modified model of pressure measurement is deduced. With this model, a reference method for temperature compensation, without temperature measurement, is presented. The reference method utilizes Rayleigh waves and L CR waves. These two kinds of ultrasonic waves travel along the axial direction of the vessel's wall, bearing the same changes in pressure and temperature. The relationship between the reference transit time delay between two ultrasonic transducers and the pressure is established through theoretical analysis and calibration tests on an air vessel. To reduce the error caused by the unevenness of temperature distribution, which might occur in the vessel's and the transducer's material, a new kind of transducer is used in the experiment, which has two piezoelectric elements and can be used for the Rayleigh and L CR waves. A pair of such transducers is mounted along the axial direction of the air vessel. The penetration area of the Rayleigh wave is almost the same as that of the L CR wave with the use of the new transducers. Comparison tests between the new transducers and the custom-used transducers show that the new transducers have better repeatability. Finally, using the air vessel as a specimen, experimental results show that the reference method is effective and that the pressure values calculated using the reference method are close to the manometer-measured values.
Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer

Chen Li,Chi Zhang,Lijun Yang,Fangtong Guo

DOI: https://doi.org/10.3390/mi13081321

IF: 3.4

2022-08-16

Micromachines

Abstract:At present, there are few methods to measure optical pressure using MEMS. However, due to its high precision and fast response, a ridge waveguide pressure sensor based on a Mach–Zehnder interferometer is designed in this paper. Through the design and optimization of each component of the structure, the sensitivity of the pressure sensor was 2.2 × 10−3 W/kPa and the linearity was 5.9 × 10−3. The sensor had a good performance and small volume, which can be used in the field of light pressure measurement and other fields that required the measurement small pressures, such as the biomedicine field.

chemistry, analytical,nanoscience & nanotechnology,instruments & instrumentation,physics, applied
High Accuracy Pressure Sensor Based on Optical MEMS Technology

Wu Zhang,Ji Fang Tao,Wei Ming Zhu,Ai Qun Liu

DOI: https://doi.org/10.4028/www.scientific.net/AMR.74.153

2009-01-01

Abstract:The optical sensor achieves its sense function generally by measuring the change of intensity or the phase of the light beams. Compared to conventional sensor types, the optical sensor enjoys the advantages such as great sensitivity, wide dynamic sense range and multiplexing capabilities. In recent years, MEMS technology is widely used on the design of optical sensor due to the small feature of MEMS, which could be high sensitive with tiny change of the detected objective. In this paper, instead of observing the change of intensity and phase, the author studied how the shift of wavelength spectrum can be utilized to sense the physical change of the object such as the pressure, vibration, velocity and electrical field. The author designed and simulated a FP-resonator-like structure which consists of 2 resonant cavities with 2 multi-layer mirrors located on two ends and I multi-layer mirror in the middle of the two cavities. The mirror in the middle is movable by physical pressure. In the simulation, it was found that this structure is able to have certain wavelength light resonate inside the cavities. The resonant mode will shift 1nm when the mirror in the center moves forward/backward for every 14nm, which is sensitive enough to detect the small change of the objectives.
Pressure estimation via measurement of reduced light scattering coefficient by oblique laser incident reflectometry

David Abookasis,Daniel Malchi,Dror Robinson,Mustafa Yassin

DOI: https://doi.org/10.2351/7.0001263

IF: 2.1

2024-02-01

Journal of Laser Applications

Abstract:Continuous measurement of pressure is vital in many fields of industry, medicine, and science. Of particular interest is the ability to measure pressure in a noninvasive and contact-free manner. This work presents the potential of oblique incident reflectometry (OIR) to monitor variation in pressure via the reduced scattering parameter (μs′). Pressure deforms the geometry of the medium and causes distortion of its internal structure and the spatial distribution of optical properties. Light scattering is related to the morphology (size, density, distribution, etc.) and refractive index distributions of the medium, and applied pressure will influence directly these parameters. Therefore, we assume that pressure can be quantitatively assessed through monitoring the reduced scattering coefficient. For this purpose, the technique of OIR to evaluate the scattering parameter during pressure variations was utilized. OIR is a simple noninvasive and contact-free imaging technique able to quantify both absorption and scattering properties of a sample. In our setup, the medium is illuminated obliquely by a narrow laser beam, and the diffuse reflectance light is captured by a CCD camera. In offline processing, the shift (δ) of the diffuse light center from the incident point is mathematically analyzed and μs′ coefficient (μs′∼δ−1) is extracted. We present here confirmation of the validity of this assumption through results of a series of experiments performed on turbid liquid and artery occlusion of a human subject under different pressure levels. Thus, μs′ has the potential to serve as a good indicator for the monitoring of pressure.

materials science, multidisciplinary,optics,physics, applied
A Compact Optical Pressure Sensor Based on a III-Nitride Photonic Chip with Nanosphere-Embedded PDMS

Jixiang Jing,Xiaoshuai An,Yumeng Luo,Liang Chen,Zhiqin Chu,Kwai Hei Li

DOI: https://doi.org/10.1021/acsaelm.1c00130

IF: 4.494

2021-04-28

ACS Applied Electronic Materials

Abstract:Pressure sensing based on high-sensitivity and fast-response photonic devices is essential for various transient and dynamic processes in diverse fields. Therefore, a miniaturized device being capable of precise and reliable detection is highly desired for the development of optical pressure sensors. Here, we develop a compact pressure sensor, showing a sensitivity of 1 μA/kPa and a fast response time of <10 ms, based on a III-nitride photonic chip combined with a PDMS membrane on submillimeter-scale footprints. The emitter and detector are monolithically integrated on a GaN-on-sapphire chip consisting of InGaN/GaN multiquantum wells, enabling quantitative readout for pressure sensing. Self-assembled polystyrene nanospheres are embedded in the PDMS layer and function as an opal-based photonic crystal, transforming the received mechanical signals into optical signals which can be precisely determined through recorded photocurrent. This underlying mechanism of angle-dependent reflective characteristics via the photonic bandgap effect is well fitted by our theoretical simulation. Sensors with opal films embedded at different vertical positions are fabricated, and their corresponding performance is systematically studied and compared through a series of pressure loading/unloading tests. The demonstrated high repeatability, stability, and durability of the developed chip-scale optical pressure sensor, paving the way for its widespread usage.The Supporting Information is available free of charge at <a class="ext-link" href="/doi/10.1021/acsaelm.1c00130?goto=supporting-info">https://pubs.acs.org/doi/10.1021/acsaelm.1c00130</a>.Fabrication process flow of photonic chip, multilayered DBR coatings, coating process of opal film, reflectance properties of PDMS embedded with nanosphere opal coating, simulation of reflectance properties of opal structure, and comparison of response time of reported PDMS-based pressure sensors (<a class="ext-link" href="/doi/suppl/10.1021/acsaelm.1c00130/suppl_file/el1c00130_si_001.pdf">PDF</a>)This article has not yet been cited by other publications.

materials science, multidisciplinary,engineering, electrical & electronic
Accurate, precise pressure sensing with tethered optomechanics

Olivia R. Green,Yiliang Bao,John R. Lawall,Jason J. Gorman,Daniel S. Barker

2024-08-31

Abstract:We show that optomechanical systems can be primary pressure sensors with uncertainty as low as 1.1 % of reading via comparison with a pressure transfer standard. Our silicon nitride and silicon carbide sensors are short-term and long-term stable, displaying Allan deviations compatible with better than 1 % precision and baseline drift significantly lower than the transfer standard. We also investigate the performance of optomechanical devices as calibrated gauges, finding that they can achieve total uncertainty less than 1 %. The calibration procedure also yields the thin-film density of our sensors with state-of-the-art precision, aiding development of other calibration-free optomechanical sensors. Our results demonstrate that optomechanical pressure sensors can achieve accuracy, precision, and drift sufficient to replace high performance legacy gauges.

Applied Physics,Instrumentation and Detectors
MEMS pressure sensor based on optical Fabry–Perot interference

Yixian Ge,Kaijie Cai,Tingting Wang,Jiahong Zhang

DOI: https://doi.org/10.1016/j.ijleo.2018.03.112

IF: 3.1

2018-01-01

Optik

Abstract:In this paper, we present a microelectromechanical systems pressure sensor based on Fabry–Perot interference using anodic bonding, and the design principles and basic mechanical model are introduced. It is found that there is a difference between the experimental and theoretical deflections; thus, it is necessary to consider the actual structure. Furthermore, the sensor is fabricated using lithography, etching, and anodic bonding. Within the pressure measurement range of 0–0.1 MPa, the linearity is 99.996%, and the sensitivity is 74.6 nm MPa–1. The test results indicate that the deflection is consistent with the theoretical analysis.
Optical Fiber Gas Pressure Sensor Based on Polydimethylsiloxane Microcavity

Xiangyu Wei,Xiaokang Song,Chang Li,Liangtao Hou,Zhaojun Li,Yan Li,Lingling Ran

DOI: https://doi.org/10.1109/jlt.2021.3054883

IF: 4.7

2021-05-01

Journal of Lightwave Technology

Abstract:Xiangyu Wei, Xiaokang Song, Chang Li, Liangtao Hou, Zhaojun Li, Yan Li, Lingling Ran<br/>We experimentally demonstrated a high sensitive gas pressure sensor, which also has more concise processing steps and lower cost. The ... [J. Lightwave Technol. 39, 2988-2993 (2021)]

engineering, electrical & electronic,optics,telecommunications
Optical power meter using radiation pressure measurement

Patrick Pinot,Zaccaria Silvestri

DOI: https://doi.org/10.1016/j.measurement.2018.07.087

2018-07-02

Abstract:This paper describes a radiation pressure meter based on a diamagnetic spring. We take advantage of the diamagnetic property of pyrolytic carbon to make an elementary levitated system. It is equivalent to a torsional spring-mass-damper system consisting of a small pyrolytic carbon disc levitated above a permanent magnet array. There are several possible measurement modes. In this paper, only the angular response to an optical power single-step is described. An optical detection composed of a laser diode, a mirror and a position sensitive detector (PSD) allow measurement of the angular deflection proportional to the voltage delivered by the PSD. Once the parameters of the levitated system depending on its geometrical and physical characteristics have been determined regardless of any optical power, by applying a simple physical law, one can deduce the value of the optical power to be measured from the measurement of the first maximum of the output voltage amplitude.

Applied Physics,Instrumentation and Detectors

Optical Pressure Measurement Principle System

High Sensitivity Photoelectric Pressure Sensor Based on A Monolithic Dual Photodiode

Optical measurement of small channel two-phase flow based on PSD principle

&Lt;title&gt;distributed Optical Fiber Pressure Sensor&lt;/title&gt;

Pressure Sensor Based on Optical Resonator in a Compact Plasmonic System

Nondestructive Pressure Measurement in Vessels Using Rayleigh Waves and L-Cr Waves

Automatic Distributed Fiber Optic Pressure-Measuring System

An Optical Fiber Pressure Sensor Based on F-P Interferometry and Intensity Demodulation

High sensitivity optical fiber pressure sensor based on thin-walled oval cylinder

The Mechanism of Errors Generated from Slug Inside Pinhole in Pressure Measurement

Dynamic Distributed Pressure Measurement Using Frequency-Agile Fast BOTDA

A Compact Optical MEMS Pressure Sensor Based on Fabry–Pérot Interference

Nondestructive Pressure Measurement in Vessels Using Rayleigh Waves and &lt;formula&gt; &lt;tex&gt;$l_{\rm CR}$&lt;/tex&gt; &lt;/formula&gt; Waves

Silicon-on-Insulator Optical Waveguide Pressure Sensor Based on Mach-Zehnder Interferometer

High Accuracy Pressure Sensor Based on Optical MEMS Technology

Pressure estimation via measurement of reduced light scattering coefficient by oblique laser incident reflectometry

A Compact Optical Pressure Sensor Based on a III-Nitride Photonic Chip with Nanosphere-Embedded PDMS

Accurate, precise pressure sensing with tethered optomechanics

MEMS pressure sensor based on optical Fabry–Perot interference

Optical Fiber Gas Pressure Sensor Based on Polydimethylsiloxane Microcavity

Optical power meter using radiation pressure measurement

&Lt;title>distributed Optical Fiber Pressure Sensor</title>

Nondestructive Pressure Measurement in Vessels Using Rayleigh Waves and <formula> <tex>$l_{\rm CR}$</tex> </formula> Waves