MEMS pressure sensor based on optical Fabry–Perot interference

Yixian Ge,Kaijie Cai,Tingting Wang,Jiahong Zhang

DOI: https://doi.org/10.1016/j.ijleo.2018.03.112

IF: 3.1

2018-01-01

Optik

Abstract:In this paper, we present a microelectromechanical systems pressure sensor based on Fabry–Perot interference using anodic bonding, and the design principles and basic mechanical model are introduced. It is found that there is a difference between the experimental and theoretical deflections; thus, it is necessary to consider the actual structure. Furthermore, the sensor is fabricated using lithography, etching, and anodic bonding. Within the pressure measurement range of 0–0.1 MPa, the linearity is 99.996%, and the sensitivity is 74.6 nm MPa–1. The test results indicate that the deflection is consistent with the theoretical analysis.