A Multipurpose Optical MEMS Sensor for Harsh Environments

G. Adams,N. McGruer,P. Nieva
Abstract:This paper presents a new multifunctional MEMS sensor for the simultaneous measurement of displacement, pressure and temperature. The sensor is based on a FabryPerot Micro-Opto-Mechanical Device (FPMOD) which is completely passive and consists of a micromachined optical cavity formed between a Silicon substrate and a top Silicon Nitride film in the form of a cantilever beam. When affixed to a vibrating surface, the amplitude and frequency of vibration are determined by illuminating the device with a monochromatic light source and analyzing the back reflected light to determine deflection of the beam with respect to the substrate. The effect of air viscous damping in the out-of-plane motion of the FPMOD is used to simulate its operation as a pressure-temperature sensor. The small size of the sensor, the materials in which it can be built, and its simple construction make it suitable for onchip integration and ideal for harsh high-temperature applications.
Engineering,Materials Science,Physics
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