Depolarization Field in FeFET Considering Minor Loop Operation and Charge Trapping

Xinpei Jia,Jinjuan Xiang,Hao Xu,Wenjun Liu,Xiaolei Wang,Wenwu Wang
DOI: https://doi.org/10.1109/ted.2022.3161399
IF: 3.1
2022-05-01
IEEE Transactions on Electron Devices
Abstract:The ferroelectric field-effect transistor (FeFET) is a promising candidate for emerging memory. However, data retention loss is a key issue. One reason for the data retention loss is the depolarization field ( <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="4.4ex" height="2.843ex" style="vertical-align: -1.005ex;" viewBox="0 -791.3 1894.6 1223.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-45" x="0" y="0"></use><g transform="translate(738,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-64" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="523" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-70" x="990" y="0"></use></g></g></svg></span> ). In this work, we theoretically investigate <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="4.4ex" height="2.843ex" style="vertical-align: -1.005ex;" viewBox="0 -791.3 1894.6 1223.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-45" x="0" y="0"></use><g transform="translate(738,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-64" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="523" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-70" x="990" y="0"></use></g></g></svg></span> of ferroelectric transistors with the metal/Hf<sub>0.5</sub>Zr<sub>0.5</sub>O<sub>2</sub>/SiO<sub>2</sub>/Si substrate (MFIS) gate structure considering the minor loop and charge trapping effect at the ferroelectric/interlayer interface. We find that <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="4.4ex" height="2.843ex" style="vertical-align: -1.005ex;" viewBox="0 -791.3 1894.6 1223.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-45" x="0" y="0"></use><g transform="translate(738,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-64" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="523" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-70" x="990" y="0"></use></g></g></svg></span> increases first and then decreases with the increased interlayer thickness ( <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="3.02ex" height="2.343ex" style="vertical-align: -0.671ex;" viewBox="0 -719.6 1300.1 1008.6" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-74" x="0" y="0"></use><g transform="translate(361,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-49" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-4C" x="504" y="0"></use></g></g></svg></span> ). The charge trapping phenomenon will decrease <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="4.4ex" height="2.843ex" style="vertical-align: -1.005ex;" viewBox="0 -791.3 1894.6 1223.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-45" x="0" y="0"></use><g transform="translate(738,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-64" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="523" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-70" x="990" y="0"></use></g></g></svg></span> and make <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="3.02ex" height="2.343ex" style="vertical-align: -0.671ex;" viewBox="0 -719.6 1300.1 1008.6" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-74" x="0" y="0"></use><g transform="translate(361,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-49" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-4C" x="504" y="0"></use></g></g></svg></span> at which <span class="mjpage"><svg xmlns:xlink="http://www.w3.org/1999/xlink" width="4.4ex" height="2.843ex" style="vertical-align: -1.005ex;" viewBox="0 -791.3 1894.6 1223.9" role="img" focusable="false" xmlns="http://www.w3.org/2000/svg"><g stroke="currentColor" fill="currentColor" stroke-width="0" transform="matrix(1 0 0 -1 0 0)"> <use xlink:href="#MJMATHI-45" x="0" y="0"></use><g transform="translate(738,-150)"> <use transform="scale(0.707)" xlink:href="#MJMATHI-64" x="0" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-65" x="523" y="0"></use> <use transform="scale(0.707)" xlink:href="#MJMATHI-70" x="990" y="0"></use></g></g></svg></span> reaches the peak value larger. 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engineering, electrical & electronic,physics, applied
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