Electron Irradiation Hardness of High-Voltage 4H-SiC Schottky Diodes in the Operating Temperature Range

A. A. Lebedev,V. V. Kozlovski,M. E. Levinshtein,D. A. Malevsky,R. A. Kuzmin
DOI: https://doi.org/10.1134/s1063782623070126
IF: 0.66
2024-03-14
Semiconductors
Abstract:Effect of irradiation with 0.9 MeV electrons on the parameters of 4 H -SiC Schottky diodes with a limiting blocking voltage U b = 600 and 1700 V was studied for the first time in the range of operating temperatures T i (23 and 175°C). The range of fluences Φ was 1 × 10 16 –2 × 10 16 cm –2 for devices with U b = 600 V and 5 × 10 15 –1.5 × 10 16 cm –2 for devices with U b = 1700 V. Irradiation at room temperature increases significantly the differential resistance of the base of the diodes. Irradiation with the same doses at T i = 175°C—i.e. at limiting operating temperature of devices, does not affect practically the parameters of current–voltage characteristics. Nevertheless, the DLTS spectra demonstrate a significant increase in the concentration of deep levels in the upper half of the band gap not only after irradiation at room temperature, but also after irradiation at T i = 175°C.
physics, condensed matter
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