Recovery at room temperature annealing on 4H–SiC SBDs by gamma irradiation

Yun Li,Min Gong,Mingmin Huang,Yao Ma,Zhimei Yang
DOI: https://doi.org/10.1016/j.mssp.2024.108331
IF: 4.1
2024-03-17
Materials Science in Semiconductor Processing
Abstract:The impact of gamma irradiation and subsequent recovery at room temperature on the device performance of commercial 4H–SiC Schottky barrier diodes (SBDs) was investigated through the analysis of the electrical properties and the deep level transient spectroscopy (DLTS). The ideality factor (n) of the SBDs increased from 1.01 to 1.13 with an increasing irradiation dose, but recovered after 7 days of room temperature annealing. To determine Schottky barrier heights (Φ B ), both current-voltage (I–V) and capacitance-voltage ( C –V) measurements were performed. The results of the combined I–V and C –V analysis showed that a little variations in Φ B were consistent with the variations in irradiation dose, except for the Φ B calculated by C –V measurement at 30 kGy. Similarly, the Φ B recovered after 7 days at room temperature. DLTS analysis revealed the presence of Z 1 /Z 2 traps in the samples after 7 days at room temperature annealing. These traps exhibited activation energies ranging from 0.46 eV to 0.55 eV. The trap concentration (N T ) increased from 9.48 × 10 12 cm −3 to 2.23 × 10 13 cm −3 with the increasing irradiation dose. These findings indicate that gamma irradiation-induced point defects were the primary cause of the degradation of 4H–SiC SBDs.
engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied
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