Electrical characteristics and deep-level transient spectroscopy of a fast-neutron-irradiated 4H–SiC Schottky barrier diode

Junesic Park,Byung-Gun Park,Hani Baek,Gwang-Min Sun
DOI: https://doi.org/10.1016/j.net.2022.08.022
IF: 2.817
2022-08-30
Nuclear Engineering and Technology
Abstract:The dependence of the electrical characteristics on the fast neutron fluence of an epitaxial 4H–SiC Schottky barrier diode (SBD) was investigated. The 30 MeV cyclotron was used for fast neutron irradiation. The neutron fluences evaluated through Monte Carlo simulation were in the 2.7 × 10 11 to 1.45 × 10 13 neutrons/cm 2 range. Current–voltage and capacitance–voltage measurements were performed to characterize the samples by extracting the parameters of the irradiated SBDs. Neutron-induced defects in the epitaxial layer were identified and quantified using a deep-level transient spectroscopy measurement system developed at the Korea Atomic Energy Research Institute. As the neutron fluence increased from 2.7 × 10 11 to 1.45 × 10 13 neutrons/cm 2 , the concentration of the Z 1/2 defects increased by approximately 20 times. The maximum defect concentration was estimated as 1.5 × 10 14 cm −3 at a neutron fluence of 1.45 × 10 13 neutrons/cm 2 .
nuclear science & technology
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